8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15
BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.
BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.
BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.
-10 EX245-FPS1 68 No.EX##-OMY0006CN Fig. 10-11 EX245-FPS2 Fig. 10-12 EX245-FPS3 69 No.EX##-OMY0006CN 11.
L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)
Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R
seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R
Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option
unit Rotary actuator with angle adjustment Part number for CRBW---BPart number for vertical auto switch unit angle adjustment unit Part number for joint unit Size For D-M9 Excluding Size Size D-M9 10 P811010-3 10 P211070-10 10 P611070-1M P611070-1 15 P811020-3 15 P211090-10 15 P611090-1M P611090-1 20 P811030-3 20 P211060-10 20 P611060-1M P611060-1 30 P811040-3 30 P211080-10 30 P611080-1M
) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,
2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X
level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400
Switch bracket Auto switch b Switch holder d Auto switch mounting screw c Auto switch mounting band D-X Technical Data 375 CG3 Series Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-M9A(V) 4.5 5.0 4.5 5.5 5.0 5.5 D-A9 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W D-H7/H7W D-H7NF/H7BA 9 8 10 10 10 11 8 10 9 10 10 11 11 11 13 13 14 14 14
BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.
Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.
160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)
.. 24 17.5 4.5 M22x l .5 19 5 24 I ~ 17 13.5 , 10.5 ~ 10. 23.5 20 . 15 3Q,5 27 17 3.5 M15x l.S 12 4 10 . 24 5 19 14.5 11.5 15 10 25 20.5 15 31.5 27 ~. .. ~ '. ar. ' Panel Mount Type: CJPB NN Exhaust ~ Bore4>6:CO.5 \ \ 4>10. 1S:Cl ~, .. " ~.
8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F
MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.