ITV0000

VAC ERR ERR ERR ERR Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 . stations 50 9 3 (8) 6.5 6.5 Dimensions in inch are noted in parentheses. 1 1 82 89.5 SUP, VAC z port 3 3 (6, 1/4") 40 40 EXH, ATM c port 25 25 (6, 1/4") 2 2 2 5 5 OUT x port (4, 5/32") Breathing hole Note) 3.7 (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page

5 Port Solenoid Valve Series SQ1000/2000

(0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

Compact Rotary Actuator

u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i

High Vacuum L Type Valve

, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

2 Phase Stepper Motor/Without Motor Brake Series LXP

Refer to page 100 for part numbers. 291 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type LXSH 2 B 1 B C 50 F9N X60 High Rigidity Slide Table Type Motor type Low particulate generation specification 2 phase

Low Profile Guide Type

CY1F10 to 25-AAL CY1F10 to 25-AAR For shock absorber fixing L Set screws (4 positions) Note1) approx.

ASR

AS ASP Pressure Valve: Series ASR Flow Valve: Series ASQ B Knob ASN Knob C Knob AQ D Knob ASV A E Knob AK Adjustment Procedure 2 ASS Pressure Adjustment Speed Control ASR 1. The cylinder speed is adjusted with knobs C , F and G . First have all the knobs fully closed and then open them gradually for adjustment.

AC Servo Motor Driver (SSCNET Type)

L A B C Lead 20 10 5 2.86 20 10 5 Parameter *1,*2 Para.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

NCA1

25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA + Stroke ZA XA SA LF P Y WF S J G B FA AT EE AO EA AL E AH DD AE D AB C Bore size (in) AA BA A KK MM 200 (2") 6 6 3 5/8 2.40 2.09 1 3/8 1 3/4 1.06 1.26 1 1/2 3/8 1/8 3/8 9/16 0.3 1 2 1/

NCA1

25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Cylinder

CP-L006ICP-LOHi jCP-i:015 10 5, 10, 1 5, 20 ,(25)~ 30 Tluhnlmfwrth pi~): CP-T006Ic P-TOlO lCP-T015 15 5,1 0,15, 20, (25 )~ 30 ItI Smm spacer is added to the 30mm stroke cylinder.

Refrigerated Air Dryer

45 50 45 50 55 60 65 70 75 80 5 10 15 1.73 1.15 0.59 0.62 1.3 1.07 1 0.72 1 1 1.68 0.81 0.82 0.95 0.88 0.68 0.9 0.95 0.57 0.86 1 0.82 1.06 0.79 1.11 1.16 Data Ambient temperature Data Air flow capacity Series IDF Series IDU Series IDF Correction factor Correction factor Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E Ambient temperature (C) Ambient temperature (C) 25 30 32 35 40 25 30

NCA1

Bore Model No. 150 (1.5) 200 (2) 250 (2.5) 325 (3/25) 400 (4) D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 M8-3pin M8-4pin M12-4pin Connector Style 1 2 1 4 Pin arrangement 2 1 3 4 4 3 3 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand voltage IP-67 (IEC529 standard) 100Mor

High Vacuum L Type Valve

, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

60

c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.