25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

XLDV Series

M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153 116.5 10 XL-OMM0005-A 6 Period and Scope of Warranty The

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Model Selection 1

250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure to generate a flow rate of 500 l/min (ANR) is P1 0.14 MPa for a 6 orifice (VX2 4), and P1 0.3 MPa for a 4.5 orifice (VX23). 3 2 For Saturated Steam [663] (179) Upstream

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) 1 Direct Operated Precision Regulator/Modular Style Series ARP20 to ARP40 Series ARP20K to ARP40K Direct Operated Precision Regulator with Backflow Function/Modular Style ARP40/ARP40K ARP30/ARP30K ARP20/ARP20K Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Nil R Flow direction d

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Fieldbus system PROFINET compatible SI Unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 Series SYJ500

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Power supply/Output connection cable (2 m) ZS-28-A D Bracket With M3 x 5L (2 pcs.) ZS-28-B Mounting screw (M3 x 8L) Sensor connector 1 pc. ZS-28-C Panel mount adapter With M3 x 8L (2 pcs.) ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8L (2 pcs.) ZS-27-D Note) These options are not attached in the factory, but packed together with it for shipment.

HRX-OM-W004

HRR Series 3.1 Precautions wiring communication 3-1 HRX-OM-W004 Chapter 3 Serial communication 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Fieldbus system Ethernet POWERLINK compatible SI unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

EXxx-OMQ0016

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ Cable with M12 connector, D

ZR

Display LCD LCD with backlight LED Pressure setting range 101 to 10 kPa 101 to 0 kPa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

In-line D-M9N D-M9P D-M9B D-M9NA D-M9PA D-M9BA Electrical entry Special function Wiring (Output) Indicator light Applicable load Smbol A B C E F G 3-wire (NPN) 3-wire (PNP) 2-wire Relay, PLC IC circuit 24 V 5 V, 12 V Grommet Yes 12 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 24 V 5 V, 12 V Relay, PLC IC circuit Water resistance (2-color display) Grommet 12 V Option (For detail, refer to page

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

Cylinder with Lock/Double Acting, Single Rod Series CLS

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.