157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers 25 32 Bore size (mm) Part no.
Refer to pages 75 through 78 for safety instructions and F.R.L. unit precautions. 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 Mounting & Adjustment 0.3 0.3 Warning 1. Set the regulator while verifying the displayed values of the inlet and outlet pressure gauges. Turning the knob excessively can cause damage to the internal parts. 2.
Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.
Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.
BF 9 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60
]75 (3)[mm2] L1L2L3 L11L21 UVWP1P2 PP2C LECSS1414 1616 (4)14(14) 1414 (3)[mm2] B1B2 BUBVBW OHS1OHS2 LECSS1616 1. 2. 3. 4.
EU2006/66/EC20[] Hg:(0.0005%), Cd:(0.002%), Pb:(0.004%) / 4 4.1 (IEC/EN 61800-5-2 ) STO(IEC/EN 61800-5-2: 2007 4.2.2.2 STO) LECSS2-TSTOSTO 4.2 4 4.2.1 LECSS2-T () 4.1.2 LECSS2-T ISO/EN ISO 13849-1 3 PL dIEC/EN 62061 SIL CL 2IEC/EN 61800-5-2 SIL 2 (STO) IEC/EN 61800-5-1IEC/EN 61800-3IEC/EN 60204-1 LECSS2-TMR-J3-D05()PLCs 4.1.3 LECSS2-T() 15 (1) (a) 75/60[AWG] 75/60 [AWG](1) L11L21
8 250 A (mm) A 60 130 VBAT05 VBAT10 Tank model 1027 VBAT Series CE Marking-Conformity Products Specifications Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Fluid Tank capacity (L) Max. operating pressure (MPa) IN port size OUT port size Ambient and fluid temperature (C) Installation Weight (kg) Material Paint Compressed air 10 20 38 5 2.0 1.0 3/8 1/2 3/4 3/8 1/2 1/2 3/4 0 to 75
M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H A U S T P O R T 15 1.5mm 18 1.8mm 20 2 mm 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF Nozzle Diameter mm Specifications Max Vacuum Pressure 1.5 1.8 2.0 mmHg (Torr) Body Ported T Y P E 55 65 85 Max Suction Flow S Type 26 (6600) 75
DXTl70-75-1.) SE1-ll-16, -17 I Z PFor swich type "-16" or "-17", rotating SET1 will adjust ON setting for OUT1 (Black lead wire, Red LED) and SET2 will adjust ON setting for OUT2 (White lead wire, Green LED).
IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane
88 112.5 123 2 46 56.5 87.5 98 6 88 98.5 125 135.5 3 56.5 67 87.5 98 10 130 140.5 162.5 173 7 98.5 109 137.5 148 11 140.5 151 175 185.5 8 109 119.5 150 160.5 9 119.5 130 150 160.5 15 182.5 193 212.5 223 12 151 161.5 187.5 198 16 13 161.5 172 200 210.5 14 172 182.5 212.5 223 Manifold C kitSV5Q14M, #5 Valve 2 position single SV5Q04V, #7 2 position double SV5Q04V, #8 VQD L1 L2 L3 L4 35.5 46 75
BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25
Model: MSQ, Type: B (Basic Type), Size: 7, Port Location: Side Port, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Precision: B (Basic), Size: 20mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Model: MSQ, Precision: B (Basic), Size: 100, Suffix: R (Shock Absorbers), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Size: 20mm, Cushion: A (Cushion Pad), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Size: 20mm, Cushion: D (Bumper), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Size: 30, Shock Absorber: H (Shock Absorber for High Energy), Port Location: 2 (Standard 180°), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)