Nozzle Type Ionizer IZN10E Series ®

mm) + Tube (O.D. 6 mm, I.D. 4 mm)*1 0.05 to 0.1 MPa Fitting (Applicable tubing O.D. 8 mm) + Tube (O.D. 8 mm, I.D. 5 mm)*1 0.05 to 0.3 MPa *1 When connecting the tubing, use a length of tubing 500 mm or less for the connection, regardless of the inside diameter size.

ACG

For details, refer to the back of page 6, Procedure for replacing or changing the mounting angle of a pressure gauge. Mounting angle view (-R specification) MPa OUT IN K P C U O S L H to 2

Pressure Sensor for General Fluids

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

EXW1-NT1_eng

Caution: CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

BP1000

[Check valve] A check valve is a safety device intended to prevent reverse flow. The AP 64 is a unique design with only one moving part in the gas stream, an O-ring. It is a springless design, free of springs and poppets. [Vacuum generator] A venturi device that creates vacuum by flowing gas through a nozzle.

V

C U U M E J E C T O R D I M E N S I O N S W I T H VA LV E A N D VA C U U M S W I T C H W I T H V A LV E S A N D S W I T C H (N)ZM HK5LZ V O LTA G E 5 24VDC 6 12VDC N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm V A C U U M S W I T C H Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-Contact S Y S T E M C I R C U I T Supply Exhaust P O R T T H R

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Note 5) Assembly of a bracket and set nuts (10-/21-AW20(K)-B to AW40(K)-B) Including 2 mounting screws for the 10-/21-AW60(K)-B Note 6) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. When the pressure gauge is attached, a 0.4 MPa pressure gauge will be fitted.

VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration

VFN Series VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration How to Order 3-way solenoid valve configuration (for Single acting actuator) VFN2120N 5B 02 N X36A Left side port operation Right side port operation C-TYPE A-TYPE NAMUR interface 3 port/5 port A 3 port Port #4 on Coil side B 5 port Port #2 on Coil side C 3 port Port #2 on Coil side D 5 port Port #4 on Coil

AW20-B to AW60-B

Note 12) A bowl guard is provided as standard equipment (polycarbonate). Note 13) A bowl guard is provided as standard equipment (nylon).

Air Suction Filter ZFA Series

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs. (Air suction filter) 276

lVFl 10

Normally Closed o SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

"Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14 3(R) port 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 19 1 3 Manual override 9 23 1(P) port 3(R) port DIN terminal VFN212N-l D (Y)ll-02l-D-l 216 19 23 2(A) port Indicator light (With "Z") Applicable heavy-duty cord O.D. 6 to 8 Pg 9 84.5(Without "Z": 66.5) 36.5 75.5(Without "Z": 57) 24 SMC 32

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

Process Pump <Fluororesin Type> Series PA3000

A for main wetted parts, stance is achieved! Clean You can order your process pump assembled in a Clean room environment and double-packaged (Order number PAP331m). Side bodies and ports are molded to achieve a great reduction in dust generation. Long service life Diaphragm are made from denatured PTFE for superior resistance and longer service life.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Normally Closed SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

® 3-Screen Display

Note Bracket A ZS-50-A Interchangeable with ISE70 With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 6

Compact Pad

Symbol/Type Compact Pad U: Flat UM: Flat with groove B: Bellows Pad diameter 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 How to Order ZP3 015 U N Pad unit Pad diameter Symbol Pad material Material Symbol NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Pad diameter 015 02 035 04 06 08 10 13 16 N S U F GN GS 1.5 2 3.5 4 6 8 10 13 16 Pad typePad diameter Pad diameter (

Thermo-chiller

30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW(kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for installation/operation) 2 pcs.