How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Maximum Ejector Stations (Max. operable nos. simultaneously) ZM053 ZM054 ZM073 ZM074 ZM103 ZM104 ZM133 ZM134 Ejector model Manifold model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R L 4 5 8 10 ZZM Stations 06 6 8 10 10 ZZM Stations 06B R L 4 5 8 10 ZZM Stations

3 Port Solenoid Valve Rubber Seal Series SY100 1

Other dimensions are same as grommet type. 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 Station L 4-3-12 13 Series SY100 Type 31 Manifold: Top Ported/SS3Y1-31Stations Grommet (G), (H) 11.5 P = 10.5 (Pitch) n-M3 x 0.5 (A port) 27.5 5 Manual override V100 3 5 G: 300 H: 600 9 R R SY 15.6 (Lead wire length) 28 (For DC) 21.5 10 25 34.5 (For AC) SYJ P P + + + + + VK 4-M5 x 0.8

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Compact Rotary Actuator

Flat face and parallel key position indicate B port is pressurized. adjustment 5 adjustment 5 adjustment 5 Key or flat Key or flat B Port B Port Angle Angle Angle A Port A Port Angle adjustment 5 Rotation range180 Rotation range90 adjustment 5 Key or flat B Port Angle A Port Rotation range360 -18- Internal structure and parts description 2-1 Size 10,15 24 Heat transferred label 1 23 Seal

1

size ZZ 20 5 37 (42.5) 78 (83.5) 20 63.5 (69) 25 5 37.5 (43) 81.5 (87) 25 64 (69.5) 32 5 38 (44) 82 (88) 32 64.5 (70.5) 40 5 44.5 (50.5) 95.5 (101.5) 40 72 (78) Bore size G S ZZ Bore size ZZ 20 7.5 49 (54.5) 90 (95.5) 20 75.5 (81) 25 7.5 49.5 (55) 93.5 (99) 25 76 (81.5) 32 7.5 50 (56) 94 (100) 32 76.5 (82.5) 40 7.5 54.5 (60.5) 105.5 (111.5) 40 82 (88) ( ): Dimensions of built-in magnet

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

MPa 10 MPa PSE531 PSE541 PSE561 101 kPa 0 PSE533 PSE543 PSE563 PSE573 100 kPa 100 kPa PSE532 0 100 kPa PSE564 PSE574 0 500 kPa PSE530 PSE540 PSE560 PSE570 0 1 MPa PSE575 0 2 MPa PSE576 0 5 MPa PSE577 0 10 MPa PSE550 0 2 kPa Internal Circuits and Wiring Examples PSE20 A Input/Output specifications 0 Brown DC(+) Analog voltage input DC() NPN open collector 5 outputs + Auto-shift 1

ZSM1-115/121

Besides, do not connect a PLC, which can detect 1 [mA], since there is a leak current of 1 [mA] in OFF state. 0 Time Hi 5 to 40 [mA] B 10 [ms] or shorter B 10[ms] or shorter Brown OUT(+) Main circuit of switch Main circuit of switch Load A 5 [ms] or longer 12 to 24 [VDC] When the auto shift input is 10 [ms] or shorter, switch output responds.

MGC

D-G79/K79/K79C 10 8 10 9 10 D-H7/H7W, D-H7BAL, D-H7NF 6 4 4 4.5 5 MTS D-H7C 9.5 7 8.5 9 10 D-G5/K59 MY D-G5W/K59W 6 4 4 4.5 5 CY D-G5NTL/G5BAL D-G59F 7 5 5 5.5 6 MG D-G5NBL 45 35 40 40 45 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Since this is a guideline including

ISA2

The voltage variation must stay within the 10% to +10% range of the rated voltage. In case importance is attached to response characteristics due to use of a DC power source, keep the variation within the 5% to +5% range. The voltage drop is the value at the lead wire to which the coil is connected.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

Lubrication Equipment

5 !6 NBR 1: 100V AC, 2: 200V AC, 4: 220V AC, 5: 24V DC, 9: Others 1.17-23 Booster Lube ALB900 Dimensions AC AV AU AF AR IR VEX AW AMR AWM AWD ITV VBA VE VY G By-pass Lubrication Adapter Related equipment/Strainer ALBA90-30 ALBA90-10, -20 AL At the terminal of an air pressure line in which a D.P.

3 Port Solenoid Valve Rubber Seal Series SY100

Other dimensions are same as grommet type. 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 Station L 4-3-12 Series SY100 Type 31 Manifold: Top Ported/SS3Y1-31Stations Grommet (G), (H) 11.5 P = 10.5 (Pitch) n-M3 x 0.5 (A port) 27.5 5 Manual override V100 3 5 G: 300 H: 600 9 R R SY 15.6 (Lead wire length) 28 (For DC) 21.5 10 25 34.5 (For AC) SYJ P P + + + + + VK 4-M5 x 0.8 (

IDX-OM-V024

. 7-5 Chapter 8 Option C . 8-1 8.1 SPECIFICATIONS . 8-1 8.2 PRECAUTIONS FOR INSTALLATION AND HANDLING . 8-1 Chapter 9 Option L . 9-1 9.1 SAFETY INSTRUCTIONS FOR USE . 9-1 9.2 SPECIFICATIONS . 9-1 9.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 9-2 9.4 MAINTENANCE . 9-2 Chapter 10 Option R . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 EARTH LEAKAGE BREAKER SPECIFICATION . 10-1 10.3 CONNECTION

Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Angle Seat Valve

/N.O. 1/4 to 1 10 to 12 10, 15, 20, 25 Fluid/Orifice Diameter Applicable fluid Orifice diameter [mm] Series Air Air Medium vacuum Medium vacuum Oil Oil Water Water Steam Steam 1 5 10 20 50 High temperature oil High temperature oil Heated water Heated water Can be used with heated water. Can be used with heated water.

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Data Name P1 Cylinder Stroke No.1 OFF ON P2 Tolerence No.2 OFF ON P3 Retries No.3 OFF ON P4 Bore Size No.4 OFF ON P5 Load Rate P6 No. of Brake Operation P7 Origin Confirmation Time P8 Err12's Confirmation Time Program 5 6 7 8 1 2 3 4 Step 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 Program 9 10 11 12 13 14 15 16 Step 1 2 3 4 5 6 7 8 9 10 11 12

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 122.2 <124.2> 142.2 <144.2> 22.6 100 120 80 25 75 n 6 4 2 3 Gate valve Aluminum + hard anodized containing PTFE and POM are used for a part of the manifold material.

Plug-in/Plug Lead: Single Unit

Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9

Series AP3100

65 C (No freezing) 2) 0.7 1.3 1.0 Inboard leakage Outboard leakage 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 4) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m) Face seal , Tube weld Bottom mount 0.36 in3 (6.0 cm3) 1.27 kg 5) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight 1/4 turn round knob with open/close indication window 7)