Vacuum System Peripherals:

q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-03SD 5/32" 10.4 25.2 34.4 16 6 18.2 12.8 17 40.7 R 1/4 18.5 7.2 1.2 34.7 17 AS221F-02-08SD AS221F-N02-05SD 3/16" 11.4 24.9 34.2 17 18.2 8 15.2 36.4 27.2 18.5 AS221F-02-10SD AS221F-N02-07SD NPT 1/4 17.5 18.5 7.2 40.7 1.2 34.7 1/4" 13.2 25.2 34.5 18.5 10 18.5 43.2 33.9 21 20 AS321F-02-06SD AS221F-N02-09SD 5/16" 15.2 27.2 36.4 6 12.8 39.3 27.8 17 33.9 43.2 20 21 AS321F-02-08SD AS221F-N02-11SD

Secondary Batteries

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +

PFxx-OMO0004CN

*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3

ITV

circuit EXH w Exhaust solenoid valve q Air supply solenoid valve u Pressure sensor r Diaphragm EXH e Pilot chamber y Exhaust valve u Pressure sensor t Supply valve r Diaphragm e Pilot chamber EXH t Supply valve SUP SUP OUT OUT EXH ITV1000 ITV2000, 3000 Block diagram Supply pressure q Air supply solenoid valve Input signal Output pressure r Diaphragm i Control circuit Pilot valve w Exhaust

VM

POM Stainless steel Material Note y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !

q"s

t signal (%F.S.)

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Dimensions L4 D3 H (Hexagon width across flats) T2 L3 A L2 D1 D2 T1 L1 Dimensions A AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 8 9 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 Weight (g) 13 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 12.7 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 12 14.3 R 1/8 33 14.6 7 18 34.7 13.2 1.5 31.6 AS220-N02-ST NPT 1/4 17.5 NPT 1/4 AS220-F02-ST

Precision Regulator Series IR1000/2000/3000

5 SUP side passage OUT side passage SUP side passage OUT side passage SUP side passage OUT side passage ARJ Setting knob AR425 to 935 q Diaphragm (A) q AMR Steel ball Bleed q w Nozzle Bleed !2 !3 !1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

ITV

234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000 B310L B410L B310T B410T Y30 Y40 Y30L Y40L

AD402/600

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

tTV2000/3000

Mist separator NAFM3OOO NAFM4OOO L-bracket B31OL 841 OL T-bracket B31OT B41OT Spacer Y30 Y40 Spacer with L-bracket Y3OL Y4OL Soacer with T-bracket Y3OT Y4OT o c o F to G E Modular and Products Combinations tTr/ffiI rIVffi Q) Air filter NAF3OOO NAF4OOO (A Mist separator NAFM3OOO NAFM4OOO O L-bracket 831 OL B41OL @T-bracket 831 OT B41OT @ Spacer Y30 Y40 @ Spacer with L-bracket Y3OL Y4OL (7

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

PFxx-OMJ0005CN

NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1

PFM7

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 T Panel mount adapter (For without flow adjustment valve) R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) Nil None ZS-33-J ZS-33-M

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.

S Couplers

T T 26 13 H L1 L1 H L3 (mm) (mm) H Width across flats 18 28 38 73 18 28 38 73 H Width across flats 90 92 91 117 90 92 91 117 When connected T Connection male thread T Connection male thread Min. hole size Min. hole size Weight g Model Weight g Model L1 L2 L1 Full length L3 KK130S(L)-01F -02F -03F -04F KK130P-01F -02F -03F -04F 53.0 62.5 66.5 76.0 53.0 62.5 66.5 76.0 Rc1/8 Rc1/4 Rc3/8 Rc1/

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -