VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10

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Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRBU2W10-S CRBU2W10-SE A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 -0.004 -0.012 0 -0.036

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

Compact 5-Port Solenoid Valve

C6: 6 (SMC) (Station n) (Station 1) 0 BUS 13.6 9.1 D D B 2 1 59.9 3/5 E 3/5 60 B 2 B 2 B 2 B 2 E 2 P 1 PWR 25.8 23.9 A 4 A 4 A 4 A 4 A 4 1 P 3 S 13.2 8.9 (21) (7.5) (11.8) (For DIN rail mounting) 4 x M8 3-pin socket 2 x M12 M3 (Pitch) P = 9 23 11.5 Manifold block internal wiring specifications Nil: Double wiring S : Single wiring L1 = 9 x n1 + 139 + 21 x n2 L2 = 9 x n1 + 43.4 L4 = L3 10.5

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) C D EH EV F G H J K L M O1 R S 25 15 to 100 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 105 to 400 32 20 to 100 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 63 Up to 200 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 16 78 205 to 500 505 to 800 Size Stroke range (mm) T U B V Without lock With lock A W Z A W Z 25 15 to 100 46.5

LX

Stroke + 246 75.5 59 LXSH S B Q F G x I Without brake 5H9 +0.030 0 depth 5 D-5.1 through Refer to Cross section C-C, bottom view. 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 32 5 M3 x 4l E-M5 2-M3 x 0.5 Effective thread depth 4 (PE terminal) 6 Thread depth 10 Crimping terminal 38 76 46 Toothed lock washer (included) Motor wire (300mm) Photo micro sensor wire (300mm) Phillips

CL

Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25

VS 8-2/VS 8-4

Size 18 mm VV802-SE Size 26 mm VV801-SE 24 Series VS 8-2/VS 8-4 S R S R Manifold Options Interface regulator (P, A, B port regulation) Specifications VVS8040-ARB--1 Interface regulator model A B P A, B Regulating port VSS R8-4 Applicable solenoid valve 1.0 Max. operating pressure (MPa) 0.05 to 0.85 Set pressure range (MPa) Air Fluid 5 to 60 Ambient and fluid temperature (C) M5 x 0.8 Pressure

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

12.5 14 8 33.6 20 8 16 5 66 46 24 64 24 27 13 86 9.5 7 85 M10 x 1.5 x 15 12.5 14 8 41.6 25 10 20 5 76 57 25 74 25 31 17 104 10.5 10 95 PA PB PW QW S T TT ta tb Q W Z M (N) MM NN P LD Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 8 7.5 M5 x 0.8 M8 x 1.0 M5 x 0.8 5.6 30 50 75 30 62 12.5 22.5 0.5 1 75 72 97 10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73

CG5-S

WH (E1) D B2 BZ MM AL A K Plug bolt (4 pcs. included) KA 8-J (F1) C 0.1 S + Stroke ZZ + Stroke H NA (mm) Stroke range A Bore size (mm) NA AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM P S 20 29 to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 M5 x 0.8 83 25 29 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Aluminum High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

MXQ

2.1 2.1 2.1 M5 x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

Electric Actuator with Integrated Guide

0.7 8 4 75 C (Thread size) M5 x 0.8 10 4 70 When mounting a coupling on the motor, mount it within the dimensional range shown on the left.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.