13

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

CG5-S

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

CLA

p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

E-P HYREG ® Series VY1 1

11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

to Order SS5YJ7--40-05 -01 P port Rc(PT)1/4 Stations 01 Rc(PT)1/8 A, B port side 2 stations 02 : : 20 stations 20 R port Rc(PT)1/4 A, B port Rc(PT)1/8 Note) For more than 10 stations, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

0.55

Surge intrusion circuit example (NPN outlet example) (24 VDC) P Grommet or L/M-type plug connector With light/surge voltage suppressor (lZ) Output circuit Surge voltage (~) 24 V 0 V sol.1: Energized 2 V or less LED Varistor Coil R Surge voltage 0 V (~) sol.2: Deenergized 2 V or less Surge voltage R P DIN or Conduit terminal With light/surge voltage suppressor (lZ) 24 V 0 V Large capacity

SV

0 V V CANL FG BS + BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD

VS 8-2/VS 8-4

5 (R1) 3 (R2) Circuit diagram 14 Size 26 mm 112 Individual SUP spacer 49 12.5 (F) (T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ712M-l-01 SYJ722-l-01 SYJ722M-l-01 Applicable blank plate ass'y SYJ700-10-2A A Port Rc (PT)1/8 SS3YJ7-20 -05 A Port Rc (PT) 1/8 Valve model Stations 20 Type 20 2 stations 02 P Port Rc (PT)1/4 P Port Rc (PT)1/8 21 Type 21 .. .. 20 stations 20 R Port Rc (PT)1/4 Note) If there are more than 6 stations in type 20 or more than 9 stations in 21 type, supply air to both sides of "P" port and

Series SV

CANL FG BS+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

AC Servo Motor Driver (Network card type ）

For 1-phase 200 V AC to 240 V AC, connect the power supply to L1 and L3. Leave L2 open. Driver LECSN2-T5 LECSN2-T9 L1/L2/L3 Main circuit power Power supply 3-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L2/L3 1-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L3 P3/P4 connect P3 and P4. (factory-wired) When using a driver built-in regenerative resistor, connect P+ and D.

/

IN OUT M M 1 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port F I J K L I F J (D) DIN terminal: D Conduit terminal: T E (U) (V) E V U 32 31.5 25 (44) G1/2 T T G1/2 M M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port I F J I F J With bracket 1 f 2.6 Bracket e 2 x 8.5 b a d (mm) Electrical entry Bracket mounting dimension Grommet Model Port size P Conduit DIN terminal

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported

VEX1

DXT170-176-2-01 DXT170-176-2-02 100 V 200 V 100 VAC 200 VAC Lead wire length Symbol Lead wire length (L mm) DXT170-176-2-03 110 V 110 VAC DXT170-176-2-04 220 V 220 VAC Nil 300 240 V 6 VD 12 VD 24 VD 48 VD DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 6 10 15 20 25 30 600 6 VDC 12 VDC 24 VDC 48 VDC 1000 1500 2000 2500 3000 Connector with light circuit

NCG/CG1

2-wire Diagnostic indication (2-color indication) Grommet B59W G59 G5P K59 G59W G5PW K59W G5BA G59F M9N M9P M9B M9NW M9PW M9BW M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 12 V Grommet 24 V Relay, PLC IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 2-wire Water resistant (2-color indication) Diagnostic output (2-color indication