Battery-less

P Set the workpiece gripping point L so that it is within the range shown in the figure below. External Gripping State Internal Gripping State Finger Finger L L L: Gripping point F: Gripping force L: Gripping point F: Gripping force F F F F Attachment Workpiece Attachment Workpiece LEHF32 LEHF40 Gripping force accuracy: 20% (F.S.)

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L2 = 6 Applicable shaft types: K, T L2 + (3 x P) L2 = (mm) (mm) K axis T axis Q1 Q2 Q1 = M L1 = L1 + (3 x P) Shaft type Shaft type J K T K T Size Size 50 50 M3, M4, M5, M6 M3, M4, M5, M6 L2 + (3 x P) L2 = 63 63 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6, M8 100 100 M5, M6, M8, M10 M5, M6, M8, M10 Symbol: A35 Machine female threads into the long

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

LJ1H

X70 Stroke 2 F P K A 1 2 LJ1H20 Vertical Mount Specification Dust seal specification Motor specification Refer to Table below.

24

[mm] MGPM, MGPL Common Dimensions Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 16 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 78 62 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

Modular/F.R.L. Units Series AC

F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

CL

+ Stroke 2-Rc P With rod boot EB EA D e 4-LD Width across flats B1 l ZZ + l + Stroke h + l LS + Stroke ZZ + Stroke Width across flats KA Long Stroke When stroke exceeds 1001 mm, mount tie-rod support ring.

5 Port Solenoid Valve Series VQZ1000/2000/3000

With light/surge voltage suppressor 1.4 1.6 L-type plug connector (L) (B) 2 Non-locking push type (Tool required) 1 (P) 3 (R) VQZ3000 L-type plug connector (L) N.O.

Hygienic Design Cylinder Series HY

(Supply port of rod end) P PB + Stroke MA C [ 25.5] E N (Supply port of head end) P (Supply port of rod end) P (Plug: Width across flats 8) (Supply port of head end) P (Plug: Width across flats 8) [SB] [SA] (Breathing port on guide) M5 x 0.8 (Plug: Width across flats 8) Note 3) PD QA PA PB + Stroke (mm) A B Bore size C D E F G H J K L MB MA N P PA Standard stroke 30 st or less 31 to 50 st

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

J K L J K J K 20 1/8, 1/4 56.7 55.3 67 56.7 31.3 55.5 41.1 30 1/4, 3/8 65.6 58.3 70 65.6 34.3 64.4 44.1 40 1/4, 3/8, 1/2 73.6 58.3 70 73.6 34.3 72.4 44.1 43 JSXM Series Modular Connection Examples (Dimensions) Please note that products do not come assembled.

0.4

M5 C4 2-position 3-position exhaust center Option None With bracket Nil IN side port size OUT side port size 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) F M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting

Fieldbus System

1 A, B port size q Series 3 5 Standard (101 psi (0.7 MPa)) Quick response type (101 psi (0.7 MPa)) High pressure type (145 psi (1.0 MPa)) Nil B K Thread piping SY3000 SY5000 Symbol Port size M5 x 0.8 1/8 Applicable series M5 01 SY3000 SY5000 Only metal seal type is available for the high pressure type. w Type of actuation One-touch fitting (Metric) SY3000 P P P P SY5000 Symbol A and B port

Air Slide Table Series MXS

Applicable size Model B C D E E1 F G M P H J K L Q MXJ MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) MXS-BS8 (L) 7 23 14 15.5 40.8 5 12 M8 x 1 M3 x 16 16.6 7 15.5 14.6 M3 x 16 1.4 MXS-BS12 (L) 9.5 31 14.5 16 40.8 6 12 M8 x 1 M4 x 15 20.5 10 15 18.5 M4 x 15 1.4 MXP MXS-BS16 (L) 11 37 17.5 19 46.7 7 14 M10 x 1 M5 x 18 23 12 18.5 21 M5 x 18 1.4 MXS-BS20 (L) 13 47 23.5 26 67.3 11 19 M14

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25