The VQC series has outstanding response times and long life. 5 port solenoid valve , Base mounted , Metal or rubber seal, Fluid: air, inert gas, VALVE, DBL SOL, PLUG-IN *LQA, VALVE, VQC2000 SOL VALVE 5-PORT, WF, VQC2000 BUILT IN FITTING >1/4, .24750 lb

HRX-OM-S004

WF-> A set of thread adapters that converts the connections from Rc to G is enclosed as an accessory. For G thread, be sure to use this adapter. 3.4 Piping HRS Series 3-28 HRX-OM-S004 Chapter 3 Transport and Setting Up How to connect piping Tighten the piping to each connection as follows below.

HRX-OM-Q026

WF-> A set of thread adapters that converts the connections from Rc to G is enclosed as an accessory. For G thread, be sure to use this adapter. 3.4 Piping HRSH Series 3-28 HRX-OM-Q026 Chapter 3 Transport and Setting Up How to connect piping Hold the each piping port with a wrench and tighten the piping.

HRX-OM-X037

WF-> A set of thread adapters that converts the connections from Rc to G is enclosed as an accessory. For G thread, be sure to use this adapter. 3.3 Installation HRL Series 3-32 HRX-OM-X037 Chapter 3 Transport and Setting Up Installation of the particle filter . The attach accessory particle filter must be installed. 1.

WF.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

NBR WFS3000-7 NBR WFS3000-8 NBR 19.8X16.6X1.6 NBR 6X3X1.5 WFS3000-6A WF~A-( stations ) Note) Manifold Base/Construction shown: Plug-in type with terminal block . Main Parts sub-ass'y No. Description Part No. Note) Component parts Applicable valve ., Manifold block ass'y .. G) End plate (kit) ass'y MBF3610-g~-1 Manifold block 0 .

Magnetically Coupled Rodless Cylinder

Bolt size: MD Attached from top with bolt Body Switch rail Note 1) Note 1) Note 1) Floating block Section D-D' 20, 25, 32, 40, 50, 63 Attached from top with CAP bolt Floating block Attached from bottom with CAP bolt Bolt size: MD Body 2-SS (Helical insert thread) Note 1) Note 1) Note 2) Switch rail Section D-D' (mm) FE Note 1) FF Note 1) HB Note 1) R Note 2) SS MD LF LA FC XB L CC XA BB FH WF

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: AG02 (G1/4, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: BG02 (G1/4, Direct Mounting, Female Thread)

Adapter Material: Aluminum, Adapter: Pad Unit, Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: AG02 (G1/4, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: B02 (Rc1/4, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: Aluminum, Adapter: Pad Unit, Pad Diameter: 20 (ø20), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: 10 (ø10, One-touch Fitting)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 20 (ø20), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A16 (M16 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN01 (NPT1/8, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 25 (ø25), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A16 (M16 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN01 (NPT1/8, Female Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 20 (ø20), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A16 (M16 x 1, Plate Mounting, Male Thread), Vacuum Inlet: 08 (ø8, One-touch Fitting)

The VQC series has outstanding response times and long life. 5 port solenoid valve , Base mounted , Metal or rubber seal, Fluid: air, inert gas, VALVE, DBL SOL, PLUG-IN, VALVE, VQC2000 SOL VALVE 5-PORT, WF, VQC2000 BUILT IN FITTING >1/4, .23148 lb

The VQC series has outstanding response times and long life. 5 port solenoid valve , Base mounted , Metal or rubber seal, Fluid: air, inert gas, VALVE, DBL SOL, PLUG-IN, VALVE, VQC2000 SOL VALVE 5-PORT, WF, VQC2000 BUILT IN FITTING >1/4, .26840 lb