Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual -03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350
AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before handling.
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation
LVQ Metric sizes 4 04 06 4 6 N.C.
Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.
Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01
AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage
Plug for cylinder port Silencer for EXH port Double check block Individual SUP/EXH DIN rail mounting SY Built-in silencer SYJ Blank plate Name plate SX VK VZ VF Except for S kit Except for L kit Except for C kit Except for C kit Except for C kit Except for C kit VFR VP7 P.1.10-26 P.1.10-21 VP4 VQ Except for S kit Except for S kit Except for S kit Except for S kit VQ4 VQZ P.1.10-66 P.1.10-
B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.
B A C B A C B A C B A C B A C B A C B A C kit 34.3 47.1 67.9 94.1 (Single) 98.6 (Double, Dual 3 port valve) 107.6 (3 position) P kit 35 5.5 28.1 12.7 J kit T Triangle mark indicator position EXH outlet 2 x M4 DIN rail clamp screw 49.4 9 kit Release for switching connector direction Applicable connector: Flat ribbon cable connector (26P) (Conforming to MIL-C-83503) U side Stations D side n
A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.
VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note
Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3302F-06 12 x 1 m AS4002F-12 AN20-02 AS2302F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing diameter x Length Speed controller Silencer Base mounted Tubing diameter x Length Speed controller Silencer AN20-02 AN3301F-06 AS1302F-06 6 x 1 m AS3002F-06 10-SYJ7123
Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)
Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure
Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I