Intrinsically Safe Valve

3/8" {4(A), 2(B) port} 46 (E-type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 (12) 2 x 4.4 (Mounting hole) 24.9 L (Lead wire length) 194.2 97.1 3 x 1/4" {1(P), 3(EB), 5(EA) port} 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9220-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 184 02 03 Terminal type (TT) 53-SY9220-TTLead wire marking

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number

VQZ1000/2000/3000

03 DIN terminal (Y): VQZ3250 1(R)-Y-02 03 Indicator light 144 300 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 55 <60> 150 Max. 10 75 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 86 78.5 M plug connector (M): VQZ3250 1(R)-M-02 03 60.5 (Lead wire length) 300 62 <67> Cover diameter 1.5 Cross section 0.23 mm2 132 66 77 Indicator light 154.5 < >: AC 2-7-46

0.55

Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold Option Description Part no.

HEC-OM-S008

0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R)

5 Port Solenoid Valve Series VQZ1000/2000/3000

1/4, 3/8 [1(P), 5(R1), 3(R2) port] VQC 66 ( ): VQZ315-G1-02 VQZ L-type plug connector (L): VQZ3 5 (R)-L10 1 02 03 1 8 9 DIN terminal (Y): VQZ3 5 (R)-Y10 1 02 03 1 8 9 SQ 105 [107.2] Approx. 300 (Lead wire length) VFS VFR 57 [64] VQ7 112.9 Max. 10 73 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ3

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

46.2 41.2 18.5 Applicable tubing O.D. d AS221FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS221FE-02-10SK 20 21 43.2 33.9 10 18.5 42 AS321FE-03-06SK 16 39.3 27.8 6 12.8 57 AS321FE-03-08SK 18.5 41 29.5 8 15.2 60 R 3/8 19 14 20.9 57.8 52.8 51.5 46.5 23 AS321FE-03-10SK 21 43.3 31.9 10 18.5 62 AS321FE-03-12SK 22 44.3 32.8 12 20.9 64 AS421FE-04-10SK 21 47.9 33.6 10 18.5 103 R 1/2 24 17 25.4 64.7 59.7

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

VEX1

Description VEX312-01 02 VEX322-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX370-10 12 VEX390-14 20 Air operated Bracket (With bolt and washer) Foot (With bolt and washer) B VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX3-32-2A Pilot exhaust port P2 silencer Note) N AN120-M5 AN210-02 Note) Only with solenoid.

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Speed Controller: Standard Type Series AS In-line Type

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Table of Contents

AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

] + 42.1 25.5 20 12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN Terminal (D): 10-SYJ7 43-D3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8[146.2] Approx. 300 (Lead wire length) 91 57.5[64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) 44.5 68.6

A

3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202