Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol 02 Stations 2 stations Note Double wiring Note 1) A, B port size (Metric) 09 02 9 stations 2 stations P, E port Applicable series Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M Specified layout Note 2) 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R)

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

46.2 41.2 18.5 Applicable tubing O.D. d AS221FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS221FE-02-10SK 20 21 43.2 33.9 10 18.5 42 AS321FE-03-06SK 16 39.3 27.8 6 12.8 57 AS321FE-03-08SK 18.5 41 29.5 8 15.2 60 R 3/8 19 14 20.9 57.8 52.8 51.5 46.5 23 AS321FE-03-10SK 21 43.3 31.9 10 18.5 62 AS321FE-03-12SK 22 44.3 32.8 12 20.9 64 AS421FE-04-10SK 21 47.9 33.6 10 18.5 103 R 1/2 24 17 25.4 64.7 59.7

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

Speed Controller: Standard Type Series AS In-line Type

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

VEX1

Description VEX312-01 02 VEX322-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX370-10 12 VEX390-14 20 Air operated Bracket (With bolt and washer) Foot (With bolt and washer) B VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX3-32-2A Pilot exhaust port P2 silencer Note) N AN120-M5 AN210-02 Note) Only with solenoid.

VQ4000

03 02 03 VVQ4000-P-1(Plug-in type) 163 (Plug-in type) VVQ4000-P-5(Plug lead type) 115.5 (Plug lead type) 25 12.5 73 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 26.4 1(P) 4(A) Rc 3/8 2(B) 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 02 03 VVQ4000-R-1(Plug-in type) 163 (Plug-in

VQZ1000/2000/3000

03 DIN terminal (Y): VQZ3250 1(R)-Y-02 03 Indicator light 144 300 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 55 <60> 150 Max. 10 75 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 86 78.5 M plug connector (M): VQZ3250 1(R)-M-02 03 60.5 (Lead wire length) 300 62 <67> Cover diameter 1.5 Cross section 0.23 mm2 132 66 77 Indicator light 154.5 < >: AC 2-7-46

VFA3000

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 0.36{0.29} 0.32 0.18 0.18 0.26 0.79{0.66} 0.64 0.57 0.57 0.41 1 8 0.37{0.50} 0.14 0.14 0.22 0.21 1.4{0.40} 0.64 0.64 0.49 0.53 VFA3140-02 2 1 4 3 VFA3440-02-X1 5 0.23{0.26} 0.23 0.23 0.23 0.34 0.66{0.50} 0.49 0.62 0.62 0.40 0.16{0.45} 0.24 0.24 0.33 0.27 0.67{0.32} 0.76 0.76 0.57 0.61 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 0.30{0.28} 0.31 0.68{0.55} 0.52

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

5 Port Solenoid Valve Series VQZ1000/2000/3000

1/4, 3/8 [1(P), 5(R1), 3(R2) port] VQC 66 ( ): VQZ315-G1-02 VQZ L-type plug connector (L): VQZ3 5 (R)-L10 1 02 03 1 8 9 DIN terminal (Y): VQZ3 5 (R)-Y10 1 02 03 1 8 9 SQ 105 [107.2] Approx. 300 (Lead wire length) VFS VFR 57 [64] VQ7 112.9 Max. 10 73 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ3

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15

F

-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

SV

400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s