5 Port Solenoid Valve, Series VQC

Indicator Unit (LED) Descriptions and Functions SI unit (DeviceNet) SI unit (PROFIBUS-DP) Input block 1 3 5 7 PWR 0 2 4 6 TM TM PWR(V) RUN PWR(V) MOD/NET PWR ADDRESS 1 H L 0 SETTINGS DIA BF FB FB PS PS Description Description Function Function Description Function PWR(V) ON when solenoid valve power supply is turned ON. ON when sensor power is turned ON.

VQC

Indicator Unit (LED) Descriptions and Functions SI unit (DeviceNet) SI unit (PROFIBUS-DP) Input block 1 3 5 7 PWR 0 2 4 6 TM TM PWR(V) RUN PWR(V) MOD/NET PWR ADDRESS 1 H L 0 SETTINGS DIA BF FB FB PS PS Description Description Function Function Description Function PWR(V) ON when solenoid valve power supply is turned ON. ON when sensor power is turned ON.

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g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25

Turntable Cylinder Series MGT

SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 77 96.5 116 63 80 100 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25

Profile Design ISO/VDMA Air Cylinder Series CP95

KK SW G BG I8 VD VA WA WB WH ZZ ZY E R I2 I9 32 22 30 12 G1/8 13 M6 6 M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

NCA1

Proper use is the users responsibilty. 52 Series NCA1 Actuator Precautions 3 Be sure to read before handling. Mounting Cushion Caution Caution 1. Be certain to align the rod axis with the load and direction of movement when connecting.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 6 6 7 12 12 15 15 7 10 12 14 17 20 26 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-

RHC

252 1/4 192 15.0 13 M22 x 1.5 30 26 M8 x 1.25 33.5 22 5 30.5 43 20 5.8 to 8.8 257 1/4 193 19.6 17 M24 x 1.5 36.9 32 M10 x 1.25 37 27 5.5 25.5 39 25 265 3/8 195 19.6 17 M30 x 1.5 43.9 38 M10 x 1.25 43.5 27 5.5 28.5 36 32 6.8 to 11.3 277 3/8 201.5 25.4 22 M33 x 2.0 47.3 41 M14 x 1.5 52.5 30 7.5 23 32 40 50 to 100 Rc P EA Rc P EA GA NE 8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB

High Power Cylinder Series RHC

A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000 100 80-0.074 J ZZ P 6.8 to 11.3 WH 305 S 1/2 H1 58 NF 215

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Possible to transfer a workpiece at low-speed.

CRJ CRA1 CRQ2 MSQ MSZ L Size 10 Screw 13 M4 CRQ2X MSQX CRQ2X MSQX 15 16 M4 20 22.5 M6 MRQ 30 24.5 M8 L 40 28.5 M8 Auto Switch Proper Mounting Position (at Rotation End Detection) Solid state switch Reed switch Size Rotation angle A Operating angle ( m) Hysteresis angle B A Operating angle Hysteresis angle B ( m) 90 19 15 25.5 21.5 5 12 61 63 10 180 22 18 35 31 90 22.5 18.5 31 27 4 9 47 52