VEX1

The pilot solenoid valve c remains energized (or pilot pressure remains applied to the P3 port of the air operated style).

SI Unit for Vacuum Manifold

(5) The release confirmation bit is set to 1 until the release pressure reaches P3 and then drops to P3-H3. -22No.EX-OMY0014-A 5. Process data 5.1. Process data on Vacuum / Release module The Vacuum / Release module occupies 2(4) bytes of input data and 2(4) bytes of output data. The number of occupied bytes differ by the selected head module.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision, 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

HRX-OM-M005

Connect the communication cables with P1, P2 and P3 as appropriate.

AC

P3[MPa]: Max. booster press. (Primary press.

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

F.S. p3%F.S.

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V e Holder t Pad Form/Diameter Part no.

Title not found

P3, L10 X3 S/S . P3, L10 X4 S/S . P3, L10 RX3-2-3-2 S/S. P4, L12 RX3-1-1-1 S/S. P4, L12 M8-6x6-8 S/S . P20, L78 Y8 S/S . P4, L14 3/8BK-6 S/S . P18, L69 C1 S/S. P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S .

Booster Regulator Series VBA1110 to 4200 1

P3 [MPa]: Max. booster press. (Smaller one between inlet press. x Intensified press. ratio and Max. operating pressure.)

PAB-OM-K007

Precautions for installation P3 3. Description and function of individual port P3 4. How to use P3 to 4 5. Maintenance and check P4 6. Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9.

PSE200

Measuring mode kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value

PSE530/200

kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 ZSE ISE CH1 CH2 CH3 CH4 SET OFF P2 P1 P4 P3 PSE High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Z I SE3 Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON PS MPa Switch output 1 & 2 kPa OFF Z I SE1 2 OUT1 Courtesy of

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Measuring mode kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value

CE2

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

PAB-OM-K008

Precautions for installation P3 3. Description and function of individual port P3 4. How to use P4 5. Maintenance and check P4 6. Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9.

LOCK UP VALVE

NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

ITV

S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa. 1.12-16

Proposals for Energy Saving

The P3 pressure will decrease. When the pressure is stabilized, press the SET button. 2. Select a flow rate display unit. Select a flow rate display unit, and then press the SET button. (Flow rate display unit) F_1 U_1 F_1 U_2 SELECT P3 U_2 l/min U_1 Press the SET button. CFM Press the SET button. Complete 4. Calculate the flow.