Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
As AP, SL, AZ, and AK series regulators for process gases are direct acting non-relief type regulators, relief cannot be performed even if the outlet pressure rises above the set pressure. By installing a BP1000 series regulator, the pressure can be kept stable by relieving pressure above the set pressure.
The BP1000 series catalog can be found
https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=process-gas-equipment&fa_id=10598
New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542 Compact and light 125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ
Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity with internal changes only, no change in external dimensions.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
NJ Tel: (908) 253-3241 FAX: (908) 253-3452 Milwaukee,WI T el: (262) 827-0080 FAX: (262) 827-0092 T oronto Tel: (905) 812-0400 FAX: (905) 812-8686 Los Angeles, CA T el: (714) 669-1701 FAX: (714) 669-1715 Rochester, NY Tel: (716) 321-1300 FAX: (716) 321-1865 Southeast Region Minneapolis, MN T el: (952) 943-1299 FAX: (952) 943-1614 Vancouver Tel: (604) 517-1646 FAX: (604) 517-1647 Phoenix,AZ
Tel: (414) 827-0080 FAX: (414) 827-0092 Southwest Region Austin, TX Tel: (512) 926-2646 FAX: (512) 926-7055 Dallas, TX Tel: (972) 406-0082 FAX: (972) 406-9904 Houston, TX Tel: (713) 460-0762 FAX: (713) 460-1510 Tulsa, OK Tel: (918) 252-7820 FAX: (918) 252-9511 Nashville, TN Tel: (615) 331-0020 FAX: (615) 331-9950 West Region Los Angeles, CA Tel: (714) 669-1701 FAX: (714) 669-1715 Phoenix, AZ
Melinda Lane Phoenix, AZ 85027 Tel: (623) 492-0908 FAX: (623) 492-9493 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Dallas) 12801 N.
This is a legacy product, and replaced byMGP100-AZ-PS MGP COMPACT GUIDE CYLINDER. SEAL KIT. ACTUATOR. 100MM MGP PART. .07040 lb. S1.
Body Size: 34 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Pressure Gauge: B (w/o Pressure Gauge, Double Sided Blanking Plate), Mounting Direction: A (Left to Right Mounting), Unit: No Pressure Gauge or MPa if Gauge is Selected
Body Size: 34 (AC30), Thread Type: N (NPT), Port Size: 03 (3/8), Pressure Gauge: B (w/o Pressure Gauge, Double Sided Blanking Plate), Mounting Direction: A (Left to Right Mounting), Unit: No Pressure Gauge or MPa if Gauge is Selected
Body Size: 34 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Mounting Direction: A (Left to Right Mounting), Unit: No Pressure Gauge or MPa if Gauge is Selected
Body Size: 34 (AC30), Thread Type: F (G), Port Size: 03 (3/8), Pressure Gauge: B (w/o Pressure Gauge, Double Sided Blanking Plate), Mounting Direction: A (Left to Right Mounting), Unit: No Pressure Gauge or MPa if Gauge is Selected
Body Size: 34 (AC30), Thread Type: F (G), Port Size: 03 (3/8), Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Mounting Direction: A (Left to Right Mounting), Unit: No Pressure Gauge or MPa if Gauge is Selected
Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Pressure Gauge: w/o Pressure Gauge, Double Sided Blanking Plate, Mounting Direction: Left to Right Mounting, Unit: Pressure Gauge in SI Units: MPa