Cylinder with Lock

D H11 E FB L4 MF R TF TG 0.2 UF Screw size 32 F5032 30 50 7 5 10 32 64 32.5 79 M6 x 20L 40 F5040 35 55 9 5 10 36 72 38 90 M6 x 20L 50 F5050 40 70 9 6.5 12 45 90 46.5 110 M8 x 20L 63 F5063 45 80 9 6.5 12 50 100 56.5 120 M8 x 20L 80 F5080 45 100 12 9 16 63 126 72 153 M10 x 25L 100 F5100 55 120 14 9 16 75 150 89 178 M10 x 25L D TG R E FB * Supplied with 4 mounting screws UF TF TG MF Single clevis

Compact and Lightweight

AS-25L ZH13/15DA Applicable thread size: M4 AS-30L ZH18/20DA Applicable thread size: M4 L-bracket wDIN Rail Mounting Bracket1 Part no. Applicable model Note Quantity AS-10D ZH05/07/10DA Applicable thread size: M3 1 pc. AS-25D ZH13/15DA Applicable thread size: M4 AS-30D ZH18/20DA Applicable thread size: M4 1 DIN rail is not included. It should be provided by the customer.

1

9 45 18 38 10 65 150 3 x 16l 32 9 45 38 18 10 65 152 4 x 24l 40 12 50 38 55 13 83 200 Series CA2 (CBA2, CV3, CVS1) Hole: NDH10 Shaft: NDd9 Spring pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 4 x 24l 40 12 13 51 192 84 11 38 55 +0.3 +0.1 4 x 25l

MLU

D2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 686   Family Description: XLG HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

VALVE SEAL FOR XLG-25, HIGH VACUUM VALVE

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion.

XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion.

LEY-OM007

28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEYG 16M _ LEYG 25M _ LEYG 32M _ [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 (kg) 0.83 0.97 1.20 1.49 1.66 1.67 1.86 2.18 2.60 2.94 3.28 3.54 2.91 3.17 3.72 4.28 4.95 5.44 5.88 LEYG 16L _ LEYG 25L

LEH_C

40%) INP 1) INP ON 0.50 2) ()INP ON a) b) INP ON c) INP ON 21 - INP SV1.0* () INP ON SV0.6* a.40%() () INP ON b. 40% ON INP OFF LEHZ LEHZJ LEHF LEHS SV10 [mm/sec] () 4150 50% 100% 540 40% 100% 3150 70% 100% 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L

mb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

3

Description Material Note 1 2 3 4 5 6 Arm Clamp bolt Hexagon nut Rolled steel Chromium molybdenum steel Rolled steel Hexagon socket head cap screw Spring washer DChromium molybdenum steel Hard steel M12 x 25L Hexagon socket head set screw Chromium molybdenum steel Flat point M8 x 8L -X The arm assembly consists of the parts No.1 to 6. 401 MK Series Made to Order: Individual Specifications

MNB

Bore size (mm) Part no. m d (Drill through) Cotter pin Note) l d Dd9 L H B C D CNG 3 x 18l 4 x 25l 4 x 35l Note) A cotter pin should be used together with a plain washer. 6 8 11 13 16 4 4.5 5 3 4 4 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 21 26 31 39 0.040 0.076 0.050 0.093 0.065 0.117 CD-M03 CD-M05 CD-M08 NT-03 NT-04 NT-05 NT-08 NT-10 32, 40 50, 63 80, 100 10 14 22 32 40 50

Cylinder with Lock

Bore size Dd9 L l m d (Drill through) Applicable split pin CD-M03*1 32, 40 10 0.040 0.076 44 36 4 3 3 x 18L CD-M05*1 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25L CD-M08*1 80, 100 22 0.065 0.117 82 72 5 4 4 x 35L Part no.

CUJ

mounting For axial mounting Without Auto Switch For side mounting Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 A B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 C D Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 M2.5 x 21L M2.5 x 23L M2.5 x 25L

CY1F

T Note1) EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB HW EW GD GC 2-P (Hexagon socket head plug) Hexagon socket head bolt For adjustment bolt fixing ES 2-P (Piping port) EY HA EH KC GB KH H GB GA G GA HB KW N N Adjustment bolt A Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW 2-P Hexagon socket head bolt For adjustment bolt fixing HW ES (Piping port) 2-P (Hexagon

Series IDG

Orifice Purge air Hollow fiber Humid compressed air I Series Variations Compatible with a wide range of flow rates (10 to 1000l/min (0.35 to 35.3SCFM) (ANR)) and dew point temperatures (atmospheric pressure dew point: 15C to 60C) (5F to -76F) IDG3, IDG3H: Outlet air flow rate 25l/min (0.88SCFM) (ANR) and IDG60S, IDG75S, IDG100S: Standard dew point 60C (-76F) types introduced Standard dew