Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K (DN)], Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

Process Pump

thread Supply port RcNPTG 1/8 Female thread Port size Pilot air Exhaust port M50.8 Female thread Body wetted areas Polypropylene(PP), Stainless steel(SUS316) Diaphragm PTFE Check valve PTFE, Polypropylene(PP) Material Liquid contact seals FKM Maximum discharge rate 2000mL/minNote1) 1000mL/minNote1) Average discharge pressurer 0 to 0.6MPa Pilot air pressure 0.2 to 0.7MPa Air consumption 40L

HRX-OM-M005

10 to 40L/min CH1-13 CH2-13 Discharge Low Flow WRN Continued Reset the setting flow rate. Check that the power supply to the product is compliant with the specification.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CL Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size Pulling force Stroke (mm) MLGC M2.5 X 0.45 X 25l 4.9N 2 M3 X 0.5 X 3l 10N 3 CNA M5 X 0.8 X 40l 24.5N 3 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. CB wThe lock piston is pushed further upward.

Corporation of America

Element dimension 65 x 250mm 65 x 500mm Fluid Cleaning solvent, Coolant Note 1) Operating pressure Maximum 1.0MPa No need to replace filter element No generation of industrial waste (clogged element) Fluid temperature Maximum 80C (176 F) Flow rate Note 2) 40L/min 80L/min Port size Rc 1 (IN, OUT, DRAIN) Material Case and cover: SUS304; O-ring: NBR/FPM 2 types of element (cylindrical type

MGG

Pulling force N 4.9 Stroke (mm) Bore size (mm) Thread size Rubber cap M2.5 x 0.45 x 25l or more 2 20, 25, 32 M3 x 0.5 x 30l or more 3 40, 50, 63 10 M5 x 0.8 x 40l or more 3 80, 100 24.5 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type While pushing the M/O knob, turn it 90 counterclockwise.

MGP

M3 x 0.5 x 30l or more 40, 50, 63 10N 3 M5 x 0.8 x 40l or more 80, 100 24.5N 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type manual release While pushing the M/O knob turn it 90 counter clockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob.

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 06 (3/4)

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 04 (1/2)