Vacuum Unit Ejector / Vacuum Pump System (Manifold base) VZ3120-5G-M5. 2 pcs. (Valve) DXT192-13-1A . 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
/2 (15A) 4 3/4 (20A) Table (2) Bracket Assembly Part No.
Replacement part/Grease pack part no.: Guide unit: GR-S-005 (5g) Cylinder unit: GR-L-005 (5g) 454 Low Profile Air Gripper Series MHF2 Construction @1 MHF2-12D to 20D i q !3 !0 @2 w u !1 !2 !7 !5 @0 o y !9 !8 !4 r t e !6 Component Parts MHZ Note Material Material No. Description No.
6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?
Current consumption 15mA or less Accuracy +/-2%F.S.
Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Air cushion 2-8. Control direction 2-9.Mounting brackets 2-10.Auto switches 3. Maintenance P17 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4.
() 0.005MPa5kPa4 1000 P28 31 - No.ZB-OM00301 -550 2/ 1 30m/s 2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.
2 w t t y !1 o !0 !2 !4 !5 CJP2B10, 16 i e u q Built-in magnet !1 o r !0 !3 !2 t w !5 !4 Component Parts No.
Series P port/Thread
Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions
Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.
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High Vacuum Angle Valve, HIGH VACUUM VALVE, 0.52 lb
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).