Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

5-Port Solenoid Valve

) SY30M-11-1A SY50M-11-1A SY70M-11-1A Part numbers shown on the left are for 10 valves (10 pcs.).

SY

Notes: Blanking plate assembly: SX3000-75-1A SUP block disc: SX3000-77-1A EXH block disc: SX3000-77-1A (2 pcs.

1

SY30M-15-1A SY50M-15-1A Part number is for one assembly.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000 SY3000-26-19A-Q SY5000 SY5000-26-1A-Q SY7000 SY7000-26-1A-Q SY9000 SY9000-26-1A-Q Series Assembly part no.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Part Number Description: HIGH VACUUM GATE VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Click here to report information errorImage shown may not match exact part number

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SX5000-50-1A-Q C4 C6 C8 SX3000-50-1A-Q C4 C6 1 Manifold block assembly P, R ports SY3000 8 One-touch fitting P, R ports SY5000 10 One-touch fitting 2 SUP/EXH block assembly SX3000-51-1A SX5000-51-1A 3 For D side End block assembly R SX3000-52-1A-Q SX5000-52-1A-Q 4 End block assembly L SX3000-53-1A-Q SX5000-53-1A-Q For U side 5 Connector box VZ3000-106-1A 24VDC only 6 Rail stopper Made by

Compact 5-Port Solenoid Valve

JSY1000 JSY11M-15P-1A JSY3000 SY30M-15-1A JSY5000 SY50M-15-1A Number of cores (Lead wire) Lead wire length [m] * The part number is for 1 piece.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

V100

PVT317-53-1A 1 pc.

Hydraulic Filters

AL-196H 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 JIS B2401-1A-G70 JIS B2401-1A-G35 AL-197H JIS B2401-1A-G90 JIS B2401-1A-G45 JIS B2401-1A-G50 JIS B2401-1A-G105 JIS B2401-1A-G55 AL-198H JIS B2401-1A-G65 Petroleum, Emulsion, Water-glycol FHIA N W JIS B2401-1A-G125 JIS B2401-1A-G70 AL-199H JIS B2401-1A-G80 JIS B2401-1A-G145 JIS B2401-1A-G95 AL-200H JIS B2401-1A-G100 JIS B2401

4/5 Port Solenoid Valve

(Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

2

Switch Characteristics Contact point configuration 1a Maximum contact point capacity 2 VA (AC), 2 W (DC) Operating voltage: AC, DC 100 V or less Maximum operating current 12 V to 24 V AC, DC: 50 mA 48 V AC, DC: 40 mA 100 V AC, DC: 20 mA 157 Series AC Accessories (Spacers/Brackets) Spacer Modular F.R.L.