Size: 7 (Body Ported), Pilot: 0 (Internal Pilot), Power Source, Command Signal: 1 (24V, 0~10V), Port Size: 12 (1 1/4), Thread: Rc, Option: BGN (Bracket, Pressure Gauge, Silencer)

1

Note 1) 4(A)/2(B) port IP67 Side ported Bottom ported Top ported Side ported Bottom ported Top ported Side ported Bottom ported Top ported Enclosure (Based on IEC60529) 99 109 104 145 172 159 205 232 227 SY3000 Weight: W [g] Note 2) SY5000 SY7000 Note 1) Refer to page 17 for valve specifications. Note 2) The valve and cable weights are not included.

2

77.6 80.2 102 77.6 104 102 77.6 104 80.2 Attachment Model K S V KS KV KSV SV A1 A2 A1 A1 A2 A1 A2 A1 A2 A3 A1 A2 A3 A1 A2 AC10A-A AC20A-A 41.6 43.2 41.6 41.6 43.2 41.6 57 41.6 43.2 43.2 41.6 57 43.2 41.6 57 AC30A-A 55.1 57.2 55.1 55.1 57.2 55.1 74 55.1 57.2 57.2 55.1 74 57.2 55.1 74 AC40A-A 72.6 75.2 72.6 72.6 75.2 72.6 95 72.6 75.2 75.2 72.6 95 75.2 72.6 95 AC40A-06-A 77.6 77.6 80.2 77.6

CATALOG

120 136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 Courtesy of Steven Engineering, Inc. !

Electric Actuators

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

Table of Contents

FB B Over 100 st 130 130 145 145 50 st or less 93 93 104 104 22 22 23 23 71.5 78 83 88 32 40 50 63 Specifications Applicable series Bearing type MGPM Slide bearing MGPL Ball bushing bearing 12, 16, 20, 25, 32 40, 50, 63, 80, 100 Bore size (mm) Other dimensions are the same as standard products. Specifications and dimensions other than above are the same as the standard, basic style.

A

285 63 66 100 M12x1.75depth23 1/4 29 14 72 30 192 108 86 54 107 308 250, 300 80 76 115 M12x1.75depth28 3/8 40 19 89 35 224 128 104 66 131 355 100 80 125 M14x2depth30 1/2 40 19 110 40 262 143 128 66 131 410 Courtesy of Steven Engineering, Inc. !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Station n Station 1 Connector polarity indicator Applicable connector: 26 pins MIL (Conforming to MIL-C-83503) (mm) 12 234.5 226.5 L1 L2 11 217 209 10 199.5 191.5 9 182 174 8 164.5 156.5 7 147 139 6 129.5 121.5 3 77 69 112 104

Table of Contents

Specifications. 99 100 104 106 109 109 110 111 113 113 114 114 115 115 116 116 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 117 118 118 119 119 120 120 121 121 122 122 123 125 126 127 127 128 128 129 130 131 131 132 133 135 135 136 137 138 138 139 140 141 141

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Mass (g) Valve model Type of actuation Valve model Type of actuation W M8 W M8 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L/M plug L/M plug 4, 2 (A, B) 4, 2 (A, B) 1, 5, 3 1, 5, 3 DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 57 82 connector 108 133 connector 51 53 68 74 connector 101 104

Table of Contents

20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104

Made to Order

Double acting Double acting Linear guide type Linear guide type w-2 From P. 432 w-2 From P. 520 w-1 From P. 1208 w-1 From P. 1302 w-1 From P. 1324 w-1 From P. 1388 MGP MGQ 10 mm increments for 10 Mechanically jointed rodless cylinder MY High rigidity/Linear guide type Linear guide type Magnetically coupled rodless cylinder Linear guide type w-1 From P. 1528 CY1 w-3 From P. 75 w-3 From P. 104

Table of Contents

MTS 105 Particle concentration (particles/m3) MY Special cylinder tube 104 Class M3.5 [Class 100] CY A special cylinder tube is employed using extruded aluminum material. Even long strokes are not subject to deflection because of direct attachment to the cylinder body, and non-contact construction is achieved through combination with a linear guide.

4/5 Port Solenoid Valve

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 39 Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5 (For mounting) 13 36.9 (DIN 38.1) 21.5

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Table of Contents

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31 1 Vacuum Ejector Box Type (Built-in

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

CNG

1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20 25 32 40 M5 x 0.8 21.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6

Table of Contents

PBT parts have conductive (104 to 107 ) and flame resistant applications. (UL-standard, V-0) Conductive NBR (104 to 107) is used for seals.