SYJ3000/5000/7000

: Approx. 300 H: Approx. 600 (Lead wire length) 78.8 [83.2] (Light/Surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8 connector (WO): SYJ3240-WO-M5 M plug connector (M): SYJ3240-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6[103

2/3 Port Valve

) 98 (108) N M 82 (92) 93 (103) 98 (108) M 90 (100) M 82 (92) 93 (103) 98 (108) Energized open Energized closed VXD2272 32A 40A 50A VXD2382 VXD2392 VXD2270 51.5 54.5 59 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 100 105 120 36 42 53 35 40 40 12 14 14 25.5 28 28 41.5 23 25.5 25.5 48 50 50 95 97 97 62 64 64 101 (111) 44.5 VXD2380 VXD2390 106 (116) 44.5 ( ): N.O. 4.1-

VCL

62.5 70 107 22 45 90 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 26 (26.5) 66.5 (73.5) 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 94 41 13.5 17 36 25 23 M5 8 1/2 26 (26.5) 70 (77) 48 68 62 65.5 50.5 103 68 70 119 35 60 102 41 17.5 17 36 30 28.2 M5 8 3/4 Note) ( ) indicates class H. 336 Series VCL Direct Operated 2 Port Solenoid Valve For Oil How to Order Manifold How to Order Manifold Assembly

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8[83.2] (Light/surge voltage suppressor) 41.5[48.5] 35.6 26.1 13 5 M5 x 0.8 (P, R1, R2 port) 10 10 10 17.5 14 28 L plug connector (L): 10-SYJ3243-L-M5 M8 connector (WO): 10-SYJ3243-WO-M5 M plug connector (M): 10-SYJ3243-M-M5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 98.6[103

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P R Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 14 M5 x 0.8 (P, R port) L plug connector (L): 10-SYJ3223-L-M3 (-F) M plug connector (M): 10-SYJ3223-M-M3 (-F) M8 connector (WO): 10-SYJ3223-WO-M3 (-F) Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 13.5 13.5 13.5 98.6 [103

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

49 46.5 47.5 45 52.5 45 52 46.5 48.5 45 45 58 51.5 54 53.5 62 103 113.5 57 55 55.5 53.5 59.5 53.5 59.5 55 56.5 53.5 53.5 65.5 60.5 65.5 64.5 71.5 115 125 68.5 66.5 67.5 64.5 70.5 65 71 66.5 68.5 64.5 65 76.5 72 73 Series C96 Auto Switch Mounting Brackets/Part No.

Smooth Cylinder/Low Speed Cylinder

style 92 g 216 g Weight/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 50 45 40 35 30 25 20 15 10 5 70 63 57 50 43 37 12 92 83 74 66 57 49 16 191 178 165 153 140 127 114 101 88 75 20 252 236 220 204 188 172 156 140 125 109 25 Weight/With Auto Switch (Built-in magnet) (g) Cylinder stroke (mm) Bore size (mm) 15 10 5 20 25 30 50 45 40 35 12 58 51 45 65 71 78 16 76 67 59 85 94 103

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 99 99 100 102 103 111 111 113 114 114 115 123 124 128 128 130 131 133 133 134 136 137 141 142 143 143 144 146 147 149 150 151 152 Series MGZ Non-rotating Double Power Cylinder 20, 25, 32, 40, 50, 63, 80. How to Order . Specifications. Construction.

V100

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

Free Mount Cylinder Series CU

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

SY

C4 C6 C8 SY5000: SS5Y5-45Stations DRSC4 C6 C8 SS5Y5-45Stations DRC4 C6 C8 Note) Dimensions L1 to L4 are the same as SS5Y5-45Stations (pages starting with 103).

Refrigerated Thermo-chiller

Q = T x L x x C 860 Q = T x L x x C 60 x 1000 6.0 x 1.2 x 1.80 x 103 x 0.23 860 = 6.0 x 20 x 1.80 x 103 x 0.96 x 103 = = 3.5 kW 60 x 1000 Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW = 3456 W = 3.5 kW Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW Circulating equipment T2: Return temperature Customers equipment L T = T2 T1 T1: Outlet

Compact Cylinder

Use the below table as a guide for the allowable rotational torque ranges. 5 10 15 20 25 30 35 40 45 50 75 100 12 60 67 74 81 88 95 16 58 67 76 85 94 103 20 103 117 131 145 159 173 187 201 215 229 25 137 152 167 182 197 212 227 242 257 272 32 196 215 234 253 272 291 310 329 347 366 506 601 Allowable rotational torque 40 12 16 20 25 32 40 50 63 205 226 248 269 291 312 333 355 376 398

Digital Flow Switches

Output mode Hysteresis mode ft3, ft3 x 103, ft3 x 106 CFM ON OUT2 is also the same.

Water-cooledThermo-chiller

Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) Stroke range (mm) H E F C D N M K J I Q S L P O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 10.5 20 77 15 46 54 9 60 17 7 M10 x 1.5 103 14 depth 10.5 93 15 8 Rc 1/4 80 12.5 98 25 21 53.5 63.5 11 77 22 6 M16 x 2.0 132 17.5 depth 13.5 112.5 16 10 Rc 3/8 100 13 117 30 27 63 75 11

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

159 130 214 204 286 235 310 398 386 386 VZ5120-01 379 379 364 364 360 360 310 301 301 286 157 252 252 252 252 235 214 204 103 159 157 130 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.