Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

MG

37.5 42.5 20 81 118 140 74 98 52 15 32 16 97 140 74 102 31 36 20 93 134 161 89 114 62 21 42 20 106.5 161 89 118 34.5 46 25 93 134 161 84 114 57 16 37 20 106.5 161 84 118 29.5 41 25 8-19-23 Series MGP MGPM, MGPL: 80, 100 T-slot dimensions 4-YY depth YL 6H7 depth 10 b a X 0.02 c d X 6 H7 e 7 5 10 6 H7 (mm) e 22.5 30 a 13.3 15.3 b 20.3 23.3 c 12 13.5 d 8 10 Bore size (mm) 80 100 Courtesy of

V100

Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

CV/MVGQ

116 80 90 105 130 150 27 32 32 37 37 71 81 101 119 133 60 70 86 102 116 42 50 59 76 92 100 110 130 160 180 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

Mechanically Jointed Rodless Cylinder Series MY1

MY3M MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BAL D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-A9 D-A9V D-Y69/Y7PV D-Y7WV Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 90 74 86 70 86 74 106 90 110 94 94 106 97 123 123 97 118 102 118 102 153 127 127 153 148 132 148 132 182.5 157.5 182.5

Battery-less

or less 284 327 158 125st or more, 200st or less 85 201st or more, 300st or less 102 40 1 Refer to page 88.

Rotary Actuator/Vane Type

Refer to pages 102 to 106 for actuators with auto switches.

CL

167 233 41 40 217 With Rod Boot h l Bore size (mm) e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106 131 156 25 37.5 50 75 100 20 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 25 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 32 17 35 12.5 77 90 102

24

140 20 12.5 17.5 55.5 40 97 102 140 20 6 11 49 50 106.5 118 161 25 9.5 21 64 63 106.5 118 161 25 4.5 16 59 25 st or less Over 25 st to 75 st Over 75 st to 175 st Over 175 st 25 st or less Over 25 st to 75 st Over 75 st to 175 st Over 175 st 32 84.5 98 118 140 16 0 13.5 33.5 55.5 40 91 98 118 140 16 0 7 27 49 50 97 114 134 161 20 0 17 37 64 63 102 114 134 161 20 0 12 32 59 End Lock Mechanism

VDW

Note 2) For low vacuum specifications, the operating pressure range is 1 Torr (1.33 x 102 Pa) to 1.0 MPa. Please consult with SMC if using below 1 Torr (1.33 x 102 Pa). Flow Characteristics Water Air 12 (INN.C.) Orifice dia. (mm ) Port size 12 (INN.C.)

Cylinder with Lock Series MNB

102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50

CV/MVGQ

116 71 81 101 119 133 27 32 32 37 37 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 18 18 18 20 20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 Up to 600 601 to 1000 MK(2) Up to 750 751 to 1000 Up to 750 751 to 1000 RS Q G Bore size (mm) LL MM N Q S W

ISO Cylinder

190 254 C85Fl-lS 35 38 74 88 170 232 C85Yl-lS 35 38 74 88 170 233 1 to 50 mm stroke Standard C85Nl-lS 119 248 340 C85El-lS 123 253 345 C85Fl-lS 109 233 323 C85Yl-lS 109 234 324 Without magnet 51 to 100 mm stroke C85Nl-lS 140 283 390 C85El-lS 144 288 395 C85Fl-lS 131 268 373 C85Yl-lS 131 268 374 101 to 150 mm stroke Basic weight CD85Nl-lS 38 42 86 102 188 253 CD85El-lS 40 44 89 106 193 258

MY1

C 6 to 31 14 to 74 102 85 Max. adjustment range Side cover Hexagon socket head button screw Figure 2. Cover installation and removal Figure 3. Maximum stroke adjustment detail Disassembly and Assembly Procedure Caution Hexagon socket head cap screw 1 Top cover (Tightening torque 25Nm) Disassembly procedure 1. Remove the hexagon socket head cap screws 1, and remove the upper plates. 2.

Table of Contents

How to Order . 74 75 77 77 78 81 82 82 83 83 83 83 83 84 84 84 85 85 85 85 85 86 86 86 86 86 87 88 89 89 90 90 91 92 92 93 93 94 95 96 97 99 99 99 99 101 102 104 104 104 105 107 108 110 110 110 110 112 113 115 115 115 116 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

mb1

Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. 32 40 50 63 80 100 90 90 102 102 124 124 164 200 200 141 145 164 Stroke range Bore size (mm) Effective thread length Width across A D Ee11 F G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300

MB1

Moreover, due to the fact that bumpers are installed at each end of the piston, overall length is increased by 6mm for 32 and 40, 8mm for 50 and 63, and by 10mm for 80 and 100. 90 90 102 102 124 124 164 200 200 141 145 164 Width across flats Stroke range Bore size (mm) Effective thread length A D Ee11 F G H MB J K MM N P S V W ZZ C B 32 40 50 63 80 100 19.5 27 32 32 37 37 46 52 65 75 95

Rotary Clamp Cylinders

moment of intertia [kgm2] Allowable moment of intertia [kgm2] 102 102 MK2 MK MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 104 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

New

R U 23 23 25.5 Q U 91 102 137.5 VXF21A< VXF22A< VXF23A< 20 20 22 20 20 22 91 102 137.5 97 108 143.5 68.5 68.5 71 47.5 47.5 50 20 20 22 12 Series VXF2 Dimensions: Direct piping type VXF24A<<< Grommet Grommet (with surge voltage suppressor) A B A B C D C D K J K J I Q z 300 1/4 Exhaust port I Q z 300 1/4 Exhaust port R 12.5 S R 12.5 S L L H E U H E U F F G 2 x P 2 x P G Port size Port size