Thermo-chiller

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

energy saving effect

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

HRX-OM-W060

Pump automatic running and stopping is repeated to prevent freezing by maintaining circulating fluid temperature at 3C to 5C. Pump automatically starts operating if the circulating fluid temperature drops below 3C. Circulating fluid is heated by the pump power generated by pump operation.

Clean Exhaust Filter

. 3) Exhaust from other equipment Use the air consumption specified for each piece of equipment as a standard. 839 Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. flow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C

Rotary Table/Rack & Pinion Style Series MSQ

If the fluid temperature is less than 5C, the moisture in the circuit could freeze, causing damage to the seals and leading to equipment malfunction. Therefore, take appropriate measures to prevent freezing. Maintenance Operating environment Warning Warning 1. Follow the procedures given in the operation manual to perform a maintenance inspection.

Safety Instructions

Take measures to prevent moisture from freezing in circuits when below 5C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture.

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

0.4

Power consumption Temperature rise 4 W type 5C 10 W type 14C Required time for attachment/detachment: Approx. 5 seconds (per unit) Reduces installation time for multiple numbers of valves. During continuous operation at 24 VDC, 0.25 MPa, 300 Hz Filter is mounted to port 1 (IN). Filter is mounted to port 1 (IN) for quick disconnect type as well.

33

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Density r [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

VXA31/32

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 220VAC 50/60HZ, Lead Wire: Grommet, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 24VDC, Lead Wire: Grommet, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 24VDC, Lead Wire: Conduit Terminal, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 100VAC 50/60HZ, Lead Wire: Conduit Terminal, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 110VAC 50/60HZ, Lead Wire: Conduit, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: Rc, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light