0.4

B B B B B B B X P X P 49 24.5 9.5 STA 1B 1A 1 2B 2A 2 4B 4A 4 3B 3A 3 D SIDE U SIDE 16 TERMINANAL NO.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side ported 1/8 (A) 4 (B) 2 Side ported

13

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Secondary Batteries

Example) 90-AFM30-N03B-RZ Air Filters/Pressure Control Equipment Actuators Air Grippers AFD 30 90 03 B Series compatible with secondary batteries q r t w e 90 Material restriction q Symbol Description 30 40 Body size Nil N F Rc NPT G w Thread type + 02 03 04 06 1/4 3/8 1/2 3/4 Port size e + Nil B Note 1) a Without mounting option With bracket Option r Mounting + Nil R Flow direction b Flow

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Elbow type Meter-out AS3201F-02 Meter-out AS3311F-02 Meter-out AS3301F-02 Component Parts Component Parts No.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Rubber seal 5 Port Solenoid Valve Series SYJ7000

A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (W0): SYJ7240-W001 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 M8 x 1 62 57.1 (

Hand Valve Series VH

Models Symbol Model Weight (kg) Body mounted Panel mounted 2 Position Number of positions Piping direction Effective area (mm2) (Cv factor) Series Port Size (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 1 (P) 3 (R) 4 3 (Exhaust center) 7.5(0.4) 0.42 VH211-02 VH201-02 1/4 VH2 Closed center 2 2 (Position) VH212-02 VH202-02 (A) 2 (B) 4 3 1 3 (Closed center) VH300-02, 03 VH310-02, 03 1 (P)

Modular Design with Uniform Body Style

B B B AC20-D 1/8 1/8 M5 x 0.8 Width across flats 14 Width across flats 14 N.O.: Black N.C.: Gray B AC30-D to AC60-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M N Q1

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

52-SY7140 (R) -TTMax.10 02 03 L 135 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 17 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 2-position double L plug connector (L) 52-SY7240 (R) -L21 22.5 02 03 13.5 4 61 41.7 2 x 4.3 (Mounting holes) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation: Black () B A 23 23 E P B A 46 X Insulation

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN

Standard Combinations

Metal bowl B B B B B Dimensions B B N.C.: Gray N.O.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A