Series SV

L dimension Weight (g) 985.5 973 960.5 948 935.5 923 910.5 898 885.5 249.3 246.2 243 239.8 236.7 233.5 230.4 227.2 224 85 Series SV Valve Manifold Specifications Manifold Option I Interface regulator How to order interface regulator Series SV1000 Series SV2000, 3000, 4000 05 00 P SV 2 000 P SV1 0 00 Series Applicable valve Regulator port SV2000 SV3000 SV4000 2 3 4 For single and double For

Check Valve Series AK

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

/

(mm) Max. operating pressure differential (MPa) Flow characteristics Note) Value for V and M options (Non-leak/Medium vacuum) Model C[dm3/(sbar)] b Cv 1.5 0.6 1.5 3.0 0.2 0.35 0.9 0.15 0.35 2 0.59 0.18 0.48 VXE2111-00 VXE2121-00 VXE2221-00 VXE2321-00 VXE2131-00 VXE2231-00 VXE2331-00 VXE2241-00 VXE2341-00 3 1.2 0.33 0.45 3.0 4.5 2.3 0.61 0.46 6 4.1 1.10 0.30 Refer to Glossary on page 44 for

Vacuum Ejector Series ZM

-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure range Hysteresis Repeatability Diaphragm Solid state Electronic circuit Solid state Reed 27 to 80 kPa 0 to 101 kPa Max. 15 kPa Max. 20 kPa 3% full span or less (Fixed) 1 to 10% of the set pressure (Changeable) 1 to 10% of the set pressure (Changeable) 1% full span

LEC-OM02904

PD16 *MD1 1 0h TM C1MR Configurator2 No.PD1500010038() 0 0 00 38 00 38 PD17 *MD2 2 0h TM C1MR Configurator2 No.PD150001003A() 0 0 00 3A 00 3A PD18 0h PD19 0h PD20 *SLA1 No.1 0 016 TM C1MR Configurator2 No.PD1500103.13 PD21 0 PD22 0 PD23 0 PD24 0h PD25 0h PD26 0h PD27 0h PD28 0h PD29 0h 5 31 5 No.

IP80-OM00019

A CE 000 Q CE 100 IP8*00-0*0 Rc1/4 G1/2 IP8*00-0*1 M Rc1/4 M201.5 IP8*00-0* 0 N Rc1/4 1/2NPT IP8*00-0* 1 02MPa IP8*00-0*0 1 1/4NPT G1/2 IP8*00-0*1 2 03MPa 2 1/4NPT M201.5 IP8*00-0* 3 1.0MPa 3 1/4NPT 1/2NPT IP8*00-0* IP8*00-0*0 4 G14 G1/2 1 IP8*00-0*1 0 5 G14 M201.5 IP8*00-0* 6 G14 1/2NPT IP8*00-0* 1 (ExdBT5) 2 IP8000(1085mm) A 0.7mm IP8000IP8100 B 1.0mm 3 C M IP8100 D S E 35100mm

SYJ3000/5000/7000

SYJ 02 2 stations Nil F N T Rc G NPT NPTF SX : : Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 20 stations R port 1/8 Applicable individual EXH spacer assembly A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size Applicable individual SUP spacer assembly ARBYJ5000-00

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 5) Dust tight/Low jetproof enclosure (IP65) is not available with interface regulator. 0.4 0.3 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 1600 Flow rate (l/min(ANR)) ARBQ4000-00-P (P A) How to Order 0.7 Outlet pressure (MPa) 0.6 0.5 Regulating port Solenoid Valve Interface regulator 0.4 A ARBQ4000-00-A-1 0.3 VQ40 (Plug-in type) B ARBQ4000-00-B-1 0.2 P ARBQ4000-00-P-1 0.1 A ARBQ4000-

E-P HYREG ® Series VY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4

VQ5000

-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in Plug

One-touch Fittings

A 06 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D.

H/DL/L/LL

(mm) Model Effective area (mm2) Weight (g) 3-connection thread M L 8 6 4 DT04-00 32 DT06-00 36 10 10 10 12 15 16 5.7 14 23.5 23.5 DT08-00 47 12 14 16 25 24.5 DT10-00 10 12 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female Connector: DHF H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in Plug

Compact 5-Port Solenoid Valve

D00 Terminal block box (T type) EX600 (S6 type) EX250 (Sm type) P, E port size (One-touch fittings) Symbol P, E port JSY1000 JSY3000 JSY5000 C8 8 One-touch fitting V C10 10 One-touch fitting V C12 12 One-touch fitting V 00*1 Plug V V V SUP/EXH end block assembly accessories and the number of accessories Accessories Quantity a Tension bolt 3 pcs.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

JXCx-OMX0009

Please do as follows when input 00 01 11 70 h into the register. RWwn+3 11 70 Fbit 8bit 7bit 0bit RWwn+4 00 01 Fbit 8bit 7bit 0bit 2When input -700.00mm into Position (RWwn+3, 4). (Full numerical data instructions, 4 Stations occupied) The position is data of the 0.01mm unit.

Check Valve Series AK 1

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

AKH/AKB Series

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

TM

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 TMA-08 KQL08-00 KQT08-00 KQH08-00 KEA10 KEB10 KEA12 KEB12 KEC-03 6 TMA-10 KQL10-00 KQT10-00 KQH10-00 6 TMA-12 KQL12-00 KQT12-00 KQH12-00 Dimensions: Multi-holder M4 round head screw (Pitch) N-holding part Cutting groove for separation Applicable tubing O.D.

V

4 9.5 8.9 10 39.3 5 14.1 13 4.2 B O D Y S I Z E AQ240F-06-00 6 11.5 11 10 43.9 6 15.2 14 5.2 AQ340F-06-00 6 11.5 11 11.8 45.2 6.3 20 14 10.4 2 M5 3 18 T U B E C O N N E C T I O N F Built-in One Touch Tube Connection OD S I Z E D I M E N S I O N S S E R I E S AQ240F/340F W I T H E X H A U S T TA K E O F F Metric 04 4mm 06 6mm Imperial 07 1/4 E X H A U S T P O R T Metric 00 Built-in Silencer