Intrinsically Safe Valve

(A), 2(B) port} 46 (E-type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 (12) 2 x 4.4 (Mounting hole) 24.9 L (Lead wire length) 194.2 97.1 3 x 1/4" {1(P), 3(EB), 5(EA) port} 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9220-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 184 02 03 Terminal type (TT) 53-SY9220-TTLead wire marking No. 1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 29 (30) AS32l1FG-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32l1FG-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 30 (31) AS42l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 54 (53) 20.9 30.2 (30.3) 1/4 17 (17.5) 13 Note 1) Reference

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size CD2 Note 1) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

High Purity Chemical Valve

LVN Valve type Material TL/TIL 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Pilot Operated

/N.O. 1/8 to 1/2 N.C.

Modular Type Air Filters Series AF

Model AF20 AF40 AF40-06 AF50 1/8, 1/4 AF30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 Applicable Model Port size 1 Model AF30 AF40 AF40-06 AF50 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 30 AF X425 2 03 B Port size 1 30 AF 2 03 B X430 For high pressure Semi-standard: Select one each for a to c. Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 Elbow type AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

S Couplers Series KKA

Body size Port size KKA3 S-01 M-1 R1 / 8 KKA3 P-01 M-1 R1 / 8 1 / 8 1 / 8 KKA3 S-02M-1 R1 / 4 KKA3 P-02M-1 R1 / 4 KKA3 S-03 M-1 R3 / 8 KKA3 P-03 M-1 R3 / 8 KKA4 S-02M-1 R1 / 4 KKA4 P-02M-1 R1 / 4 1 / 4 1 / 4 KKA4 S-03 M-1 R3 / 8 KKA4 P-03 M-1 R3 / 8 KKA4 S-04 M-1 R1 / 2 KKA4 P-04 M-1 R1 / 2 KKA6S-03 M-1 KKA6P-03 M-1 R3 / 8 R3 / 8 1 / 2 1 / 2 KKA6S-04 M-1 KKA6P-04 M-1 R1 / 2 R1 / 2 KKA6S-06M

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Standard Combinations

1/4, 3/8, 1/2 AF + ARG ACG20B ARG20 AF20 1/8, 1/4 ACG30B ARG30 AF30 1/4, 3/8 ACG40B ARG40 AF40 1/4, 3/8, 1/2 AF + AFM + ARG ACG20C ARG20 AF20 AFM20 1/8, 1/4 ACG30C ARG30 AF30 AFM30 1/4, 3/8 ACG40C ARG40 AF40 AFM40 1/4, 3/8, 1/2 AWG + AFM ACG20D AWG20 AFM20 1/8, 1/4 ACG30D AWG30 AFM30 1/4, 3/8 ACG40D AWG40 AFM40 1/4, 3/8, 1/2 INDEX Air Combination Regulator with Built-in Pressure Gauge

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

VFRA3000

Cv 1.9 2.2 1.9 2.2 1.6 1.7 2.0 (0.96) 2.4 (0.96) 1.5 1.7 VFRA3111-02 VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15