AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SV400 SV200 SV300 SV100 3/8: SY9000-27-1 1/4: SY7000-27-1-Q Aluminum die-casted SY5000-27-1-Q SY3000-27-1-Q Sub-plate i 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Refer to thread types on page 440 for .

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

. current command) 05 Speed command (8 V/max. speed) 06 Servo motor-side droop pulses (10 V/100 pulses) (Note 1) 07 Servo motor-side droop pulses (10 V/1000 pulses) (Note 1) 08 Servo motor-side droop pulses (10 V/10 pulses) (Note 1) 09 Servo motor-side droop pulses (10 V/10 pulses) (Note 1) 0A Feedback position (10 V/1 Mpulses) (Note 1) 0B Feedback position (10 V/10 Mpulses) (Note 1) 0C Feedback

LEC-OM07605CN

1) (1) (1) 46.2 2 SD (1) (1) (1) 46 46.3 SD (1) (1) (1) (1) 46.5 3 DB (1) (1) (1) 46.6 4 DB (1) (1) (1) 47 47.1 SD 47.2 SD 50.1 1 SD (1) (1) (1) 50.2 2 SD (1) (1) (1) 50.3 4 SD (1) (1) (1) 50 1(1) 50.4 1 SD (1) (1) (1) 50.5 2 SD (1) (1) (1) 50.6 4 SD (1) (1) (1) 51.1 3 DB (1) (1) (1) 51 2(1) 51.2 3 DB (1) (1) (1) 8 4 8.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

for the locking type. ( ) 4(A) port side: Orange 2(B) port side: Green 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) With option L1 (Station n) (Station 1) Light/surge voltage suppressor 58.4 3/5 3/5 E E 4 A 4 A 4 A 4 A 101.2 2 B 2 B 2 B 2 B P 1 P 1 5 5 3 E 1 P 3 E 1 P 82.7 63.8 75 1 1 1 1 Individual SUP spacer 12 Individual EXH spacer (10) (For DIN rail mounting) 14.7 L Dimension

AC Servo Motor Driver (Network card type ）

operation SD (Note 1) (Note 1) (Note 1) 50.3 Thermal overload error 4 during operation SD (Note 1) (Note 1) (Note 1) 50 Overload 1 50.4 Thermal overload error 1 during a stop SD (Note 1) (Note 1) (Note 1) 50.5 Thermal overload error 2 during a stop SD (Note 1) (Note 1) (Note 1) 50.6 Thermal overload error 4 during a stop SD (Note 1) (Note 1) (Note 1) 51.1 Thermal overload error 3 during operation

5-Port Solenoid Valve

1 SY 3 5 1 0 0 1 Base mounted !

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Fieldbus system EtherNet/IP compatible SI Unit

System 4 1: Diagnosis of SI unit is generated. 5 1: Diagnosis of IO-Link master unit is generated. 6-7 Reserved 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 Unit 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7.

LEC-OM02904

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

SMI_PortConfigList (acquires IO-Link master port parameter: Write) [Request] Data Value Notes Service code 0x33 Service code Class 0x90 Class Instance 0x01 to 09 Instance, unit No.+1 Attribute 0x65..68 Port No. 1 to 4 Data[0] 0x80 Fixed value Data[1] 0x00 Fixed value 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3: DI_C/Q 4: DQ_C/Q Data[2] Port mode 0: No Device Check 1: Type compatible Device

Stainless Steel 316 Fittings

M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 M M L Note) Value of FEP tube.

Fieldbus system EtherCAT compatible SI Unit

) Enum0800 0=Disable 1=Enable 40x0:05 Inrush current filter Enum0800 0=Disable 1=Enable 40x0:06 Restart after short circuit Enum0801 0=Manual 1=Auto 0=0.1 ms 1=1 ms 2=10 ms 3=20 ms 40x0:09 Input filtering time Enum0806 0=1 ms 1=15 ms 2=100 ms 3=200 ms 40x0:0A Input extension time Enum0807 40x1:0 Monitor open circuit UNSIGNED8 Number of Channels 40x1:09 40x1:10 Channel 8 Channel 15 (Open

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Metric size Inch size Universal 3 04 06 08 10 12 01 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 With One-touch fitting M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 AS 01 02 03 04 ASP ASN U10/32 N01 N02 N03 N04 AQ ASV AK ASS Needle Valve/Flow Characteristics ASR ASD230F ASD330F ASD430F 100 200 400 1.5 3 6 ASF Effective area (mm2) Effective

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size Control type KE 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 AS-FG 6 8 AS-FP With One-touch fitting 10 AS-FM AS-FM For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 716. Use 1/8" tube.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.