o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Be sure to use positive COM. 12 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for D-sub Connector SS5J3-60FD U (S, R, RS) 1 2 Stations (Pitch) P = 10 [External pilot spec.] 23.6 12.8 32.1 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 31 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [1(P), 3/5(E) port] Applicable

VFR

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

0.55

12 11.8 (16) 2 x 5.5 (For mounting) (26) M5 x 0.8, 1/8 [1(P) port] 2.2 (PE port) 1.3 1P Grommet (G) (H) DC without light/surge voltage suppressor 17.8 43.4 10 12.8 2 x M4 x 0.7 thread depth 5 (For mounting) 5EA 3EB 15.8 G: Approx. 300 H: Approx. 600 (Lead wire length) 12.5 81.2 L-type plug connector (L): VF1120-;L;;1;(-F) M5 01 DIN terminal (D) (Y): VF1120-; ;;1;(-F) D Y M5 01 86.8 Max. 10

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

Title not found

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

) 23 7 2.3 R P Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11 11.5 M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN terminal (D,Y): 10-SYJ52MD Y-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) L plug connector (L): 10-SYJ52M-L-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65.5 [67.7] 60.9 28.1 [35.1]

LEC-OM07605CN

LECSS2-T5LECSS2-T7 40 168 135 0.8 H LECSS2-T8 40 168 170 1.0 LECSS2-T9 60 168 185 1.4 W D 4.8.3 [mm] a1 c d1 a a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

/

Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

3 Port Air Operated Valve Series SYJA300

VQZ VZ VS VFN 4-4-25 Series SYJ500 Manifold for Internal Pilot Type How to Order Applicable solenoid valve SYJ512--M5 SYJ512M--M5 SYJ522--M5 SYJ522M--M5 A port M5 x 0.8 Type 20 SS3YJ5 20 05 Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

Large Size Vacuum Module: Series ZR

for vacuum (ZSE2) + Filter Filter Caution ZL D Lead wire specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) E F 1.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.