Plug-in/Plug Lead: Single Unit

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts

VQ7-6/7-8

Applicable cable O.D.: 8 to 10 3(1) VK SOL.A ZNR VZ 1(4) DC: Single VF COM 3(1) VFR SOL.B SOL.A ZNR ZNR VP4 1 (4) 2 (2) DC: Double VZS 3(1) ~ + VFS SOL.A ~ ZNR 1(4) VS4 100 VAC: Single VQ7 COM ~ ~ 3 (1) + + Holding screw SOL.A EVS SOL.B ~ ~ ZNR ZNR Ground nut VFN 1 (4) 2 (2) Housing Washer 100 VAC: Double 3 (1) Grommet (Rubber) ~ + SOL.A ~ ZNR 1 (4) 200 VAC or more: Single Terminal block

VQ7-6/7-8

Spacer (1) Spacer (2) Spacer (1) VQ7 Spacer (1) Throttle valve spacer Spacer (1) Spacer (1) Throttle valve spacer Note 2) Note 3) Note 3) Note 1) EVS Note 1) A throttle valve spacer and double check spacer (including those with residual pressure release valve) cannot be combined.

Dual Rod Cylinder Series CXSJ/CXS

1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

SFOD-OMT0011CN

1) FileViewWindowHelp (1-1-1) File (F) Print Alarm save Software Exit (1-1-1-1) Print [] a) Step DataParameterTest Drive Alarm 9 No.SFOD-OMT0011CN-A Step No.

Plug-in/Plug Lead: Single Unit

66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External pilot port 27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are

3

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Vinyl Chloride Air Operated Valve

) Port size Rigid vinyl chloride tube Note 1) O.D. 26 mm (Nominal dia.: 20A) O.D. 32 mm (Nominal dia.: 25A) Rigid vinyl chloride tube Note 1) O.D. 22 mm (Nominal dia.: 16A) Applicable tube 6 mm One-touch fitting Note 2) Rc1/8, M5 x 0.8, NPT1/8 Pilot port size 10 times/min (reference) Operating frequency Note 1) Rigid vinyl chloride tube complies with JIS K6742 Note 2) SMC polyolefin tubing

Bracket mounting inserts found on the standard ZSE20A are omitted as well.  25A-ZSE20A(F) is UL/CSA, CE and RoHS compliant, with an IP40 enclosure rating.

Bracket mounting inserts found on the standard ISE20B are omitted as well.  25A-ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

Bracket mounting inserts found on the standard ZSE20B(F) are omitted as well.  25A-ZSE20B(F) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types.  25A-ZSE20C(F) is a digital vacuum sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the 25A-ZSE20, 25A-ZSE20C(F) adds a 2nd switch output, as well as analog voltage or current output. 

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types.  25A-ZSE20C(F) is a digital vacuum sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the 25A-ZSE20, 25A-ZSE20C(F) adds a 2nd switch output, as well as analog voltage or current output. 

Bracket mounting inserts found on the standard ZSE20B(F) are omitted as well.  25A-ZSE20B(F) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

Bracket mounting inserts found on the standard ISE20B are omitted as well.  25A-ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

Bracket mounting inserts found on the standard ZSE20A are omitted as well.  25A-ZSE20A(F) is UL/CSA, CE and RoHS compliant, with an IP40 enclosure rating.

Flow ranges (lpm): 0.5-4, 2-16, 5-40, 10-100; PORT sizes (Rc, NPT, G): 3/8, 1/2, 3/4, 1 (flow range dependent); Temperature range (°C): 0 to 90; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F.S.; Repeatability: ±2% F.S.

Flow ranges (lpm): 0.5-4, 2-16, 5-40, 10-100; Port sizes (Rc, NPT, G): 3/8, 1/2, 3/4, 1 (flow range dependent); Temperature range (°C): 0 to 90; Output options: NPN or PNP (switch); 1-5V or 4-20mA; Accuracy (flow): ±3% F.S.; Repeatability (flow) ±2% F.S.

Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100 (selectable from PFM5 ranges); Analog input, sensor (DC): 1-5V or 4-20mA; Analog output (DC): 1-5V or 4-20mA; Switch output modes: Hysteresis, window comparator, accumulation set point, accumulation pulse; Display accuracy: ±0.5% F.S.; Analog output accuracy: ±0.3% F.S.