0.4

D-G

smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

Rotary Actuator/Vane Type

D-M9m m: Operating range Size q m: Operating range q d: Hysteresis range 10, 15 170 20 20, 30 100 15 40 86 10 Actuated position: ON Auto switch d: Hysteresis range OFF D-S/T99(V)m, S9P(V), S/T79, S7P, D-97/93A, 90/90A, R73/80m (OFF) Magnet Size q m: Operating range q d: Hysteresis range 10, 15 110 10 20, 30 90 40 52 8 Note) Since the figures in the above table are provided as a guideline

ZP

C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y

Air Cylinder Series CM2

Auto switch model Bore size (mm) 25 20 32 40 D-A9 D-M9 D-M9W q BM2-020 (1) w BJ3-1 q BM2-025 (1) w BJ3-1 q BM2-032 (1) w BJ3-1 q BM2-040 (1) w BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7BAL D-H7NF BM2-025 BM2-020 BM2-032 BM2-040 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-025 BA2-020 BA2-032 BA2-040 D-A3A/A44A D-G39A/K39A BM3-025 BM3-020 BM3-032 BM3-040 Note 1) Two kinds of auto switch mounting brackets

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Modular F.R.L. Units

F G H SUP. 3 1 2 q Body size Description Symbol C D E 20 30 40 Key can be mounted when residual pressure is released.

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

ZP

D. Applicable tube O. D.

Stability of suction position,

D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6 110.6 ZP3E-Y32UMlJB30 91.6 135.6 ZP3E-Y32UMlJB50 111.6 155.6 Model A B ZP3E-Y40UMlJB10 66.6 110.6 ZP3E-Y40UMlJB30 91.6 135.6 ZP3E-Y40UMlJB50 111.6 155.6 Model

New

type VXF24A<<< Grommet Grommet (with surge voltage suppressor) A B A B C D C D K J K J I Q z 300 1/4 Exhaust port I Q z 300 1/4 Exhaust port R 12.5 S R 12.5 S L L H E U H E U F F G 2 x P 2 x P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4 Exhaust port (44) U F G1/2 E H L G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Combination example q Air combination AC20B-02E-D 1 pc. Spacer with bracket Y200T-D 1 pc. Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

7

Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5) 98 (106) 98 (106) 104 (112) 168 (176)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Required fluid volume for extension (l/min) Required fluid volume for retraction (l/min) Bore size (cm) Piston rod diameter (cm) Piston speed (mm/s) Q: Q: D: d: : Q = D __ 4 6 _ 1000 .. Formula (1) Q = (D d) __ 4 6 _ 1000 .

JIS Standard Hydraulic Cylinder

D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-G5/K59/G59F D-G5W/K59W D-G5BA/G5NT D-G39/K39 D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 5.5 6 7 5.5 6.5 5.5 6 7 5.5 6.5 CHQ 4.5 4 4.5 4.5 4.5 4.5 4.5 4 4.5 4.5 4.5 4.5 CHK 4.5 5 5 6.5 6.5 4.5 5 5 6.5 6.5 CHN 8 12 9.5 11 10 8.5 13 10.5

NCQ8

Q J E D-rod Dia.