High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Table of Contents

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-20(-Q) 10-SS5YJ5-20P(-Q) Applicable manifold base 10-SS5YJ5-40(-Q) 10-SS5YJ5-41(-Q) 10-SS5YJ5-42(-Q) 10-SS5YJ5-43(-Q) 10-SS5YJ5-41P(-Q) 10-SS5YJ5-43P(-Q) Applicable manifold base Type 10-SS5YJ5-41(-Q) Type 10-SS5YJ5-42(-Q) Type 10-SS5YJ5-43(-Q) Type 10-SS5YJ5-41P(-Q) Type 10-SS5YJ5-43P(-Q) Caution Mounting screw tightening torque M2.5: 0.45 Nm Use caution to the assembly orientation

Modular F.R.L. Units

C B IN OUT OUT IN Q V R F Plate thickness AR10-A: Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S

5 Port Solenoid Valve

The S kit is compatible with a combined I/O Unit.

SY

(16 outputs) S-Link (8 outputs) T Link Mini DeviceNet CompoBus/S (16 outputs) CompoBus/S (8 outputs) JEMANET J1 J2 K Q R1 R2 U V CC-Link SS5Y3-45SA-05U-C6. 1 set (Type 45S, 5 station manifold base with serial unit part no.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

Air Cylinder Series CM2

x 1.5 19.5 10.5 37.5 M10 x 1.25 34.5 1 4 40 75 55 11 50 3.2 7 10 27 30 12 4 23 7 16 54 22 14 24 21 M32 x 2 41 8 10 M14 x 1.5 13.5 46.5 42.5 21.5 Dimensions by Stroke Built-in One-touch Fittings (mm) (mm) Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Symbol Q P Bore size (mm) LS S ZZ LS S ZZ LS S ZZ LS S ZZ LS S ZZ 87 20 20 127 156 152 112 181 177 137 206 21.5 6

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

CQ2

Contents CQ2B12-S-PS 12 CQ2B16-S-PS 16 Kits include items !4, CQ2B20-S-PS 20 Pneumatic !5 and !6 from the CQ2B25-S-PS 25 table above. CQ2B32-S-PS 32 CQ2B40-S-PS 40 CQ2B50-S-PS 50 Spring extend type (T type) piston and piston rod are combined. (Stainless steel) Seal kits consist of items !4, !5 and !

Rotary Actuator/Vane Type

E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !