Table of Contents 7 No. q w e r t y u i o !
M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]
r e w q r e w q VG VP S070 VQ VKF N.C.
N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
6 r e w !4 o !5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !
How to Order q w e r t y u i o !
SQ2000 Plug-in Type Main Parts and Pilot Valve Assembly Plug Lead Metal seal type Rubber seal type SQ 1000 Single: SQ2130 Single: SQ2131 SQ 2000 r e q w r e q w EX510 SQ2130 SQ2131 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) F kit Double: SQ2231D Double: SQ2230D r e q w r w e q P SQ2230D SQ2231D 2 (B) (A) 4 2 (B) (A) 4 kit (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) J kit
Contents No. q w e r t y u i o !0 !1 !2 !3 !
How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !
W Horizontal lifting 13-11-99 Series ZPT/ZPR Component Parts Series ZPT Series ZPR Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adaptor e Adaptor q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.
Temperature distribution of 120C specifications Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 140 e, r, t Comparison with KF25 flange 120 e Body 1 100 Temperature (C) 80 r Body 2 q, w t Body 3 60 40 20 w Bellows Valve q 0 0 30 60 90 Heater Time (minutes) High Vacuum Angle Valves
q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.
+ l Keeper plate Air release GA GB R J H 2-Rc P CDH9/f8 MM C D E e Width across flats G l 10 f Air release SS + Q + l + Stroke W W CX U +0.4 +0.1 NA T NB ZZ + Q + l + Stroke L K F S + Stroke MA B RR SS + Stroke A ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS L U W f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 38 16 32 15 37
Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.
Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Buffer body Aluminum t Electroless nickel plated Buffer adaptor Brass y q q q ZL Electroless nickel plated Adaptor A Brass u Electroless nickel plated X type adaptor
90o END w END q END q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation Switch for rotation END w END w Auto switch B port A port Solid-lined curves indicate the rotation range of the output shaft with single flat (key).
(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.