F

M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38 KQE10-03 M20x1 24 24 34.5 15 21 21 41.5/29.5 12 38 KQE12-03 M22x1 24 27 37 15 23 22 58.3/46.1 12 12

VQ7-6/7-8

) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector

NCQ2/CQ2

F B E YA 03 Applicable air cylinder bore size Material: Chromium molybdenum steel (Nickel plated) (mm) Bore size (mm) 03 05 08 10 For 32, 40 For 50, 63 For 80 For 100 B D E F M T1 T2 Part no. 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 18 6.8 16 42 6.5 10 6 20 9 20 50 6.5 12 8 Mounting bracket 26 11 25 62 8.5 16 10 YA YB YU 31 14 30 76 10.5 18 12 Type A mounting bracket Type B mounting bracket

CQ2

(A type, B type) Bore size (mm) T2 B D E F M T1 Part No. 6.5 10 18 6.8 16 6 42 YA-03 32, 40 YA 03 6.5 12 20 9 20 8 50 YA-05 50, 63 8.5 16 26 11 25 10 62 YA-08 80 Applicable bore size 10.5 18 31 14 30 12 76 YA-10 100 For 32, 40 For 50, 63 For 80 For 100 03 05 08 10 Mounting bracket Weight (g) Bore size (mm) K L M Part No.

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

Fluoropolymer Piping Equipment

16.5 1.8 LQ1H4G-Ml 1/2" 1/4" 42 24 21 48 28 6 6 LQ1H5A-Ml 3/4" 1/2" 55 29 26 62.5 39 10 10 1/2" 44 10 23 LQ1H42-Ml 10 7.4 LQ1H43-Ml 12 9.4 LQ1H44-Ml 10 7.4 LQ1H45-Ml 8 39.5 20 17 47.5 23 5.5 LQ1H46-Ml 6 3.6 LQ1H4F-Ml 3 34 15 14 42 16.5 1.8 LQ1H49-Ml 12 1/4" 42 24 21 48 28 6 6 LQ1H51-Ml 19 1/2" 55 29 26 62.5 39 10 10 44 LQ1H5B-Ml 1/2" 9 LQ1H5C-Ml 3/4" 23 15 LQ1H5D-Ml 1/2" 9 LQ1H5E-Ml 3/8"

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Proposals for Energy Saving

Note 4) -01, -02, -03,-06 at the end of the part number indicates the port size. (01: 1/8, 02: 1/4, 03: 3/8, 04: 1/2, 06: 3/4) Note 5) The pressure gauge for AW1000-M5G-1 will be G27-10-R1 for 1.0MPa.

LVQ

class 2 3 4 5 6 Type of part 5 Symbol U B N Type of part Nut & insert bushing Insert bushing Nut LQ1 LQ2 3 6 LQ1 LQ1 For pilot port Tubing size Body class LQ1 1 U 03 LQ1 Tubing O.D. 1/8" (3) 4 Body class Symbol 1 Body class 1 Symbol 03 04 Applicable fitting LQ1 1 Type of part Note) Cannot change to tubing of different diameter.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example PSS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

KR

26.5 22 30 33.5 24 20.5 15.5 26 27.5 14 26.1 8 18.0 18.5 17 Applicable tubing 17 41.5 10 29.5 21 3 8 KGH10-03 29 22.5 30 1 2 KGH10-04 27 19 53 42 34 22 1 4 3 8 KGH12-02 KGH12-03 34.5 28.5 19 12 23.5 22 58.3 46.1 30 1 2 3 8 1 2 KGH12-04 KGH16-03 KGH16-04 51 61 47 22 22 39.5 32 35.5 26.5 81 (81) 113 (96) 16 24 24 Connection thread Reference dimensions after R thread installation

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

SYJ300/500/700

VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

Table of Contents

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger