Slider Type Ball Screw Drive/11-LEFS Series

-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23 Speed [mm/s] Note 2) 10

Air Cylinder

) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size NA S TA TB ZZ Bore size TC TD TE TF TG 20 24 69 (77) 11 11 106 (114) 25 29 69 (77) 11 11 111 (119) 32 35.5 71 (79) 11 10 (11) 113 (121) 40 44 78 (87) 12 10 (12) 130 (139) 50 55 90 (102) 13 12 (13) 150

ZP

Vacuum Pad Series ZP Non-rotating 2 to 8: Stroke 6, 10, 15, 25 mm 10 to 32: Stroke 10, 20, 30, 40, 50 mm 40, 50: Stroke 10, 20, 30, 50 mm Type Without buffer With buffer VAC VAC Vacuum entry port Mounting Vacuum entry port Mounting ZX 13-11-2 to 13-11-27 VAC VAC Buffer body Female thread Female thread Male thread Series (Common) ZR ZPT Barb fitting VAC Barb fitting Buffer body ZM Vertical

NCG/CG1

M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(16) 30 30 25 20 20 20 20 20 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 69(77) M5 x 0.8 29 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 25 Up to 300 301 to 400 71(79) Rc 1/8 35.5 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 28.5 Up to 300 301

Air Cylinder Series CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 CS1 63 M10 x 1.25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 7 18 14 M18 x 1.5 31 80 M12 x 1.75 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 11 22 17 M22 x 1.5 37 CS2 100 M12 x 1.75 Up to 750 20 to 750 40 37 116 41 92 30 52 14

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

CA2

to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up to 600 20 to 600 35 32 27 64 20 40 10 17 M10 x 1.25 18 14 M18 x 1.5 31 CS1 80 102 13 11 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 22 17 M22 x 1.5 37 100 116 16 11 up to 750 20 to 750 40 37 41 92 30 52 14 21 M12 x 1.75

CM2

Built-in One-touch fitting Basic Front flange Built-in One-touch fitting Spring return CM2F20SCM220A, #11 SCM220A, #11, #4 SCM220A, #11, #4, #19 CM2F25SCM225A, #11 SCM225A, #11, #4 SCM225A, #11, #4, #19 CM2F32SCM232A, #11 SCM232A, #11, #4 SCM232A, #11, #4, #19 CM2F40SCM240A, #11 SCM240A, #11, #4 SCM240A, #11, #4, #19 Bore P Q 20 6 23 25 6 26 Basic Front flange Built-in One-touch fitting

CQ2

Standard (mm) A Without auto switch B P A B P Q Q With auto switch Bore (mm) 5st 10 50 20 5st 10 33 20 5st 10 20 5st 10 20 5st 10 60 20 5st 10 43 20 32 40 50 RC(PT) 1/8 28 40 M5 X 0.8 50 38 11.5 11 10.5 11 RC(PT)1/8 10.5 11 RC(PT)1/8 46.5 34.5 56.5 44.5 56.5 39.5 66.5 49.5 RC(PT)1/8 RC(PT)1/4 78.5 50.5 10.5 10.5 88.5 60.5 10.5 68.5 40.5 68.5 50.5 RC(PT)1/4 C D E H I J K

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Valve stations Note Stations Symbol 02 2 stations (1) Double wiring specifications Series 11 02 11 stations 1 2 3 4 SV1000 SV2000 SV3000 SV4000 (2) 2 stations Specified layout (Up to 23 solenoids possible.) 20 20 stations Tie-rod base Mounting Nil D D0 Note) Direct mounting SS5V 1 1 05 U 10FD DIN rail mounting (With DIN rail) Cassette base DIN rail mounting (Without DIN rail) When a longer

5

58 M8 x 1.25 depth 16 7 18 M18 x 1.5 55 63 35 32 27 38 20 32 2 58 11 72 M10 x 1.5 depth 16 7 18 M18 x 1.5 69 80 40 37 32 50 25 40 3 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 86 100 40 37 41 60 30 50 3 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 106 (mm) Bore size (mm) Stroke range (mm) S TA TB ZZ Rc, NPT port G port GA GB P GA GB P 20 77 11 11 114 12 12 1/8 12 12 M5 x 0.8 25 77 11 11

ZP

10 117 132 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40 50 ZPY02 to 08 ZPY10 to 25 ZPY40, 50 +7 +8 +9 +12 +14 +26 5.5 +28 +30 5.5 P . 13-11-65 to 13-11-68 13-11-50 51 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting with Buffer How to Order Series ZPY With buffer ZPY A10 U 16 K GS 20 U6 Mounting thread (Refer to Table (3) for applications.)

Free Mount Cylinder Series CU

20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30 11-/22-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 11-/22-CDU25 25 Suction flow rate of vacuum suction type (Reference values) Specifications Size Suction flow rate l/min (ANR) 6 10 16/20/25 Bore size (mm) Item 6 10/16 20/25 6 10 12 1.05MPa 0.7MPa 0.12MPa

CG1

20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 With rod boot ZZ Bore (mm) Applicable pin part no.

Air Cylinder Series MB

7 10 10 13 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 38 1/8 1/4 1/4 3/8 3/8 1/2 1/2 84 84 94 94 114 114 120 4 4 5 9 11 .5 17 17 6.5 9 10.5 12 14 15 15 178 186 210 210 258 258 314 90 90 102 102 124 124 132 184 192 218 218 268 268 316 32.5 38 46.5 56.5 72 89 110 12 16 20 20 25 30 32 30 35 40 45 45 55 60 13 13 14 14 20 20 27 6 8 11 11 13 16 16 47 51 58 58 72 72 97 46 52 65 75 95 114 136 22 30 35

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C85

M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VQC 20 16 8 20 20 08 Note) Two manifold stations are required for double solenoid 3 position valves (dual body type).

JIS Standard Hydraulic Cylinder

37 31 3/8 39 141 11 2 113 20 28 58 20 98 21.5 15 52 1 40 M10 x 1.25 25 to 1800 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 12 15 52 52 1/3.5 stroke 1 50 M10 x 1.25 25 to 1800 76 52 15 40 19 11 43 35 1/2 46 155 13 2.5 121 25 33 85 25 135 15 15 52 55 2 63 M12 x 1.5 25 to 1800 90 63 15 42 19 14 43 35 1/2 52 163 15 2.5 132 31.5 43 98 31.5 161 15 20 55 65 80 M16 x 1.5 25 to 1800