Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Valve Single Unit

Purchasing order is available in units of 10 pieces.

Vacuum Module Series ZX

ZSE2-0X ZSE3-0X Air 0 to 101 kPa High speed response/10 ms Uses a carrier diffusion semiconductor pressure sensor Fluid Set pressure range Hysteresis ZU 3% Full span or less 1% Full span or less 3% Full span or less 12 to 24 VDC (Ripple 10% or less) ZL Temperature characteristics Repeatability ZY Voltage Port size M5 x 0.8, M6 x 1 (Option) ZF Note) If not operated within the specified range

AC Servo Motor Driver (CC-Link Type ）

4 10.

AC Servo Motor Driver (CC-Link Type ）

TROUBLESHOOTING 101 to 10-15 10.1 Trouble at start-up . 102 10.2 Operation at error occurrence . 103 10.3 CC-Link communication error . 103 10.4 When alarm or warning has occurred . 104 10.4.1 Alarms and warning list . 104 10.4.2 Remedies for alarms . 105 10.4.3 Remedies for warnings . 10-13 10.5 Point table error . 10-15 11.

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

5 Port Solenoid Valve Series SV

to 101) Internal pilot operating pressure range MPa (psi) 4 position dual 3 port valve 2 position double 0.1 to 0.7 (14 to 101) 3 position 0.2 to 0.7 (29 to 101) Operating pressure range 100kPa to 0.7 (14.5 to 101) External pilot operating pressure range MPa (psi) 2 position single, double 0.25 to 0.7 (36 to 101) 3 position 10 to 50 (with no freezing) (14 to 122) Ambient and fluid temperature

VCW

) 10 is N.C.

VCW

Note) Note) 10 is N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) 10 is N.C.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

.) 10-SYJ7123-5LOU-01 (-Q) 3 sets (Single solenoid part no.) 10-SYJ7223-5LOU-01 (-Q) 2 sets (Double solenoid part no.)

SYJ3000/5000/7000

(-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (WO): SYJ7120-WO-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6 [49.6] Approx. 300 Pg7 91.9 [94.1] 101.9 82.1 [84.3] 91 83.6 77.1 61.1 35 35 35 35 28.3 28.3 28.3 28.3 21 21 21 2-3.2 (For

Series KP/KPQ/KPG

1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21

Series KP/KPQ/KPG

1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Max. operating pressure differential (MPa) Weight (g) Max. operating pressure differential (MPa) Weight (g) Flow characteristics Flow characteristics Max. system Note) Max. system Note) Orifice Orifice size (mm) Model AC DC Port size Port size (mm) Model AC DC pressure pressure size (MPa) Av x 10-6 m2 Cv converted (MPa) Av x 10-6 m2 Cv converted 2 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective