5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

10 stations Rc 3/4 Note 1) Max. 10 stations.

LEC-OM07605CN

) 10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW CW 21 CCW CCW 0A (123) (10V/1Mpulses) 0B (123) (10V/10Mpulses) 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V] CW CW CCW 0C (123) (10V/100Mpulses) 0D 8[V] 10 [V] 100 [Mpulse] 0 400[V] 0 100 [Mpulse] -10 [V] CW CCW CCW 0E 2(3) 15 (345) (10V/10 pulses) 8 [V] 10

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

VP300/500/700

Y:4.5 to 7 D: 6 to 8 Y: 146.1 Rc 1/4, 3/8 (P port) MAX.10 D: 146.6 Pg9 D: 99.4 116.4 Y: 101.4 118.4 D: 90.4 107.4 Y: 92.4 109.4 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-9 10 Series VP300/500/700 Dimensions: VP700/Body Ported Grommet terminal (E) Grommet (G) Applicable lead wire O.D. 2.3 to 2.8 163 162 72.4 82.4 62.9 72.9 (103.5) (External pilot port) (Rc

3 Port Air Operated Valve Series SYJA300 1

VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

AC Servo Motor Driver (MECHATROLINK-II type)

5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 03 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 03 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 07 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 08 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 03 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 03 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 07 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 08 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)