5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.
Made to Order Specifications (For details, refer to page 10-21-1.)
A B C E 141 120 85 1/2 725 410 IDU6D IDF6D 165 445 165 141 915 IDU-BP6C IDF-BP6C 1/2 141 3/4 120 85 755 410 196 IDU8D IDF8D 445 196 141 1045 IDU-BP8C IDF-BP8C 3/4 152 3/4 1 131 91 815 405 IDU11C IDF11C 196 445 196 1155 152 IDU-BP11C IDF-BP11C 3/4 1 175 131 91 890 405 222 IDU15C IDF15C 445 222 175 1230 IDU-BP15C IDF-BP15C 1 1 183 91 70 970 405 IDU22C1 IDF22C1 222 445 222 1445 71 IDU-BP22C
CJ1 Series MB Series MB1 Width across flats MA CJP MM Width across flats MA ZZ MM ML MH MI Bore size (mm) MK MA ZZ MM ML MH MI MK Bore size (mm) MA 32 40 50 63 80 100 175 10 18 44 24 10 21 32 40 50 63 80 100 175 10 18 44 24 10 21 CJ2 M I 183 14 20 48 32 12 27 183 14 20 48 32 12 27 205 18 21 53 38 15 32 205 18 21 53 38 15 32 ML + Adjustment CM2 Stroke MK 205 18 21 53 38 15 32 205 18 21 53
A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st
manifold base Type 10-SS5YJ7-20 Type 10-SS5YJ7-21 Type 10-SS5YJ7-40 Type 10-SS5YJ7-41 Type 10-SS5YJ7-42 Type 10-SS5YJ7-41SA Applicable manifold base Type 10-SS5YJ7-40-Q Type 10-SS5YJ7-41-Q Type 10-SS5YJ7-42-Q Type 10-SS5YJ7-41SA-Q Gasket SYJ7000-21-1A-2-Q SYJ7000-21-3A Round head combination screw Blanking plate SYJ7000-21-3A-Q Gasket (Positioning pin) Dust cap Applicable manifold
41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6
S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting
Q Q Q MXW Series Q Q Q Product Features .pages 134-135 Q Q MXW Series Q How to Order .page 136 Q Specifications.pages 137-139 Q Operation Guide .pages 140-141 Q Table Deflection .page 142 Q Construction/ Parts List, Seal Kits .page 143 Q Dimensional Drawings.pages 144-153 Q Auto Switch Specifications and Mounting .pages 154-155 Q Please see safety instructions
3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48
(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47
Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35VDC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY <2> 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) STOP ALARM 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being
H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.
OUT 201 IN CQ2 10 20 78 141 204 15 6 OUT 314 MU IN 12 25 126 224 323 21 11 OUT 491 Snap Ring Installation/Removal Caution IN 84.8 6 12 14 31 48 10 3 OUT IN 151 8 16 24 54 85 19 4 OUT q For installation and removal, use an appropriate pair of pliers (Tool for installing a C snap ring). w Exercise caution even when using an appropriate pair of pliers because of the possibility ofthe snap
8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171
Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.
327 363 342 327 363 106 75 40 106 306 45 0.2 Stroke to 1200 135 336 380 153 354 398 384 358 402 111 85 45 115 340 50 0.2 Stroke Lube Non-lube Lube Non-lube to 998 135 336 380 153 354 398 389 363 407 111 90 45 120 345 50 0.2 Stroke 160 411 466 176 427 482 105 141 55 65 0.17 Stroke Other dimensions are the same as standard style.
L 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 Trademark DeviceNet is a trademark of ODVA.
L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.
Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.