Table of Contents

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

MXS Series Air Slide Table

55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16

Low Friction Cylinders Series MQ

30 30 3 25 25 20 2 20 20 16 10 16 1 10 10 100 75 60 30 100 75 60 30 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral load at the rod end is for the rod end female thread.

SYJ300/500/700

V100 SY How to Order Connector Assembly SYJ For DC: SY100 30 4A VK For 100 VAC: SY100 30 1A Groove Cover VZ For 200 VAC: SY100 30 2A Pin Cover VT Groove For other voltages of AC: SY100 30 3A DC Polarity display Lever Pin VP Lead wire length Without lead wire: SY100 30 A -+ Socket (with connector and 2 of sockets only) Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000

HRX-OM-S004

Weight(dry condition) kg 151 154 Compliance standard CE Marking EMC directive 2014/30/EU Machinery directive 2006/42/EC 1 Use 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temp. or ambient temperature is lower than 10 oC.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

0.4

AXT661-13AL AXT661-13AL-6 AXT661-13AL-10 AXT661-13AL-20 AXT661-13AL-30 AXT661-13ANL AXT661-13ANL-6 AXT661-13ANL-10 AXT661-13ANL-20 AXT661-13ANL-30 AXT661-14AL AXT661-14AL-6 AXT661-14AL-10 AXT661-14AL-20 AXT661-14AL-30 AXT661-14ANL AXT661-14ANL-6 AXT661-14ANL-10 AXT661-14ANL-20 AXT661-14ANL-30 Note) When using the negative common specifications, use valves for negative common. 79 Plug Lead

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 23 23 30 30 42 42 50 8.5 11 12 15 18 23 28 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 442 Series

Compact Guide Cylinder Series MGQ

, refer to pages 1829 to 2021.) 0UT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 MGF 0UT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 MGZ IN 151 30 45 60 76 91 106 121 136 151 XA Change of rod end shape Heat resistant cylinder (10 to 150C) XB6 0UT 314 63 94 126 157 188 220 251 283 314 20 10 MGT XB9 Low speed cylinder (10 to 50 mm/s) IN 236 47 71

SQ1000/2000

AXT661-12AL AXT661-12AL AXT661-14AL AXT661-14ANL AXT661-13ANL AXT661-13AL 300mm 300mm AXT661-14AL-6 AXT661-14ANL-6 AXT661-13ANL-6 AXT661-13AL-6 600mm 600mm AXT661-14AL-10 AXT661-14ANL-10 AXT661-13ANL-10 AXT661-13AL-10 1000mm 1000mm AXT661-14AL-20 AXT661-14ANL-20 AXT661-13ANL-20 AXT661-13AL-20 2000mm 2000mm AXT661-14AL-30 AXT661-14ANL-30 AXT661-13ANL-30 AXT661-13AL-30 3000mm 3000mm Note) When

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

MQQ

106.3 74 20 7 4 60 34 75 40.5 151 142 97.5 25 7 4 60 40 75 44.5 160 151 102.5 Single clevis style: MQMLC (20 and 25 only) 20, 25 (Non-integrated type) +0.058 0 9 hole H10 CI 0.1 0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke Bore size (mm) S CI Z H ZZ 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other

Large Size Vacuum Module: Series ZR

80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1-W15S1 Exhaust characteristics

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

0.55

How to Order Connector Assembly DC : V200-30-4A100 VAC : V200-30-1A200 VAC : V200-30-2AAC other voltages: V200-30-3AWithout lead wire : V200-30-A (With connector and 2 pcs. of socket) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm How to Order Include the connector assembly part number together with the part number for the plug connectors

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

type (Except for 6) Single clevis type (Non-integrated type) Double clevis type 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

ITV

Description Applicable model ITV10 P398010-600 Flat bracket assembly (including mounting screws) ITV30 ITV20, 30 P398020-600 ITV10 P398010-601 L-bracket assembly (including mounting screws) ITV20, 30 P398020-601 [Cable connector] 243 Part No.