End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.

Air Slide Table Series MXW

E J HH H GG Model NN Z N L K -X MXW8-75 64 106 71 92 30 19 1 228 5 45 31 MXW8-100 98 112 106 115 32 34 1 278 5 70 56 Individual -X MXW8-125 121 144 129 138 32 32 25 2 328 6 95 81 MXW8-150 141 176 149 168 32 32 45 2 378 7 120 106 157 Series MXW MXW12/Stroke: 50, 75 mm Operating port 2 x M5 x 0.8 Width across hexagon socket hole 2.5 J 12 6.5 Note) If long bolts are used, they can touch the

A

30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

ZP

25 27 29 30 25 27 30 31 26 10 ZPT 20 25 29 31 33 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 57 129 135 132 138 133 139 33 34 30 129 131 134 134 143 129 133 34 140 147 153 160 144 151 141 147 36 38 141 148 39 145 152 Weight by Stroke (g) 15 20 25 30 40 50 Stroke (mm) Model 10 ZPT2004 3507 4010 ZPT02 to 08 thin section series 10 to 16 +6 +7 +8 ZPT10 to 25 ZPT40 to 50 +11 +38 +13 +

MG

MGPL25-30 is selected.

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

AC Servo Motor Driver (Pulse input type/Positioning type ）

COMMUNICATION FUNCTION 141 to 1440 14.

MGP

100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100 200 0.2 0.3 0.4

AC Servo Motor Driver (Network card type ）

Regenerative power [W] LEC-MRLEC-MRBuilt-in Driver RB-032 RB-12 [40 ] regenerative [40 ] resistor LECSN-T5 30 LECSN-T7 10 30 100 LECSN-T8 10 30 100 LECSN2-T9 20 30 100 11.2.2 Parameter setting Set [Pr. PA02] according to the option to be used. [Pr. PA02] 0 0 Regenerative option selection 00: Regenerative option is not used.

Free Mount Cylinder Series CU

D 30 6 30 M9BW CDU With auto switch D Made to order Built-in magnet Refer to page 484 for the Made to Order specifications.

ZP

25 27 29 30 25 27 30 31 26 10 ZPT 20 25 29 31 33 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 57 129 135 132 138 133 139 33 34 30 129 131 134 134 143 129 133 34 140 147 153 160 144 151 141 147 36 38 141 148 39 145 152 Weight by Stroke (g) 15 20 25 30 40 50 Stroke (mm) Model 10 ZPT2004 3507 4010 ZPT02 to 08 thin section series 10 to 16 +6 +7 +8 ZPT10 to 25 ZPT40 to 50 +11 +38 +13 +

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

For 30 type, common external pilot (on manifold side).)

53

time 1 min 30 s 20 s Max.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

CV/MVGQ

14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 CV 12 19 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 30 15 50 39 18 10 24 16 7 11 21 22 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 MVGQ Dimensions by Stroke Single Acting/Spring Extend

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

AS

As a guide, it should be tightened by 15 to 30 with a tool after tightening it manually. Be careful not to damage the lock nut by applying too much torque.

Electric Actuators

Limit switch 10 20 30 None B contact specification 2 pcs.

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1