10

[mm] Mounting side Model A B C D E F Weight [g] MHL2-10DZ-X85 8 67 88 108 132 112 350 MHL2-10D1Z-X85 8 83 104 144 168 131 420 MHL2-10D2Z-X85 8 101 122 182 206 169 495 MHL2-16DZ-X85 9.5 79 96 126 156 126 650 MHL2-16D1Z-X85 9.5 109 126 186 216 179 840 MHL2-16D2Z-X85 9.5 129 146 226 256 219 965 MHL2-20DZ-X85 9 89 108 148 186 146 1115 MHL2-20D1Z-X85 9 131 150 230 268 221 1490 MHL2-20D2Z-X85 9

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

Series VQ Base Mounted Metal Seal/Rubber Seal

14 15 16 85 115 137.5 148 L1 L2 (L3) (L4) 101 131 162.5 173 117 147 175 185.5 133 163 187.5 198 149 179 200 210.5 165 195 225 235.5 181 211 237.5 248 197 227 250 260.5 213 243 262.5 273 229 259 287.5 298 245 275 300 310.5 261 291 312.5 323 277 307 337.5 348 293 323 350 360.5 309 339 362.5 373 Note) Manifolds with SI unit for Matsushita's MEWNET FP and Allen Bradley Co.'

2

Cross spacer Piping adapter * Needs to be ordered separately. * Needs to be ordered separately. 131 Modular F.R.L. Units Series AC Page 157 Pressure switch with piping adapter Page 158 Accessories (Spacer/Spacer with bracket) Modular F.R.L.

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: NPTF, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Individual Pilot EXH, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 3/8, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: 20 (Individual Pilot EXH), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 03 (3/8), Thread: T (NPTF)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: T (NPTF)

Base Mounted Wiring: Body Ported Common PE Individual Wiring Entry, Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: NPTF, Control Unit: -

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: NPTF, Control Unit: -

CLA

80 11 11 7 17 M22Xl .5 37 'I, 55 15 23 I 100 11 131 17 M26X 1.5 1 14 40 'I, 56.5 15 25 13 Series CLA Dimensions Foot type/CLAL 8P lock releasing port p Front cylinder port eSO lock port for rxess\Jre k)ck-u Name plate to Indicate locking ~~~;t::;W=il (in the case of exhaust loCK-up' ~ a: bI,ml<.. plug With breather} '" with Rod Boot P A ~I cyhnder port .$. length n 8 f E~K F G8 I r ... 01

ISO Cylinder

18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 20 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 92.5 (98.5) 10 64.5 (68.5) 92.5 (96.5) 12 70 (73.5) 108 (111.5) 16 69 (72.5) 95 (98.5) 121 (124.5) 107 (110.5) 133 (136.5) 159 (162.5) 20 87 112 137 131

ZP

, 25, 32 Hexagon width across flats 6 Hexagon width across flats 6 Hexagon width across flats 14 Hexagon width across flats 14 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 7 Hexagon width across flats 7 Flat with ribs Flat/Flat with Ribs Deep F G H Y Model B C D A E Flat Model ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131

CXS

0.5 through 3 6.5 3 45 45 M4 x 0.7 x 14.5 (Hexagon head bolt) M4 x 0.7 x (Hexagon nut) 2-M4 x 0.7 through M3 x 0.5 x 10 (Hexagon socket head cap screw) (16) (8 + ST) 2-M3 x 0.5 through 4 33 0.2 6 ST 8 + ST 12 + ST 44.5 + ST 56 + ST Part no. 10 18 22 54.5 66 CXSJ10-10 20 28 32 64.5 76 CXSJ10-20 30 38 42 74.5 86 CXSJ10-30 40 48 52 84.5 96 CXSJ10-40 50 58 62 94.5 106 CXSJ10-50 75 83 87 119.5 131

Electro-Pneumatic Valve NVEP/NVEF Series

L l + + + + + radialon duo to imVrlical mounting aids heai Feedback circuit trEN-So-Fll mrRJi Electropneumatic proportional valve VGND t24vpc 1 12 vEA 130.131 DIMENSIONS vEA130/131 |:::=::=: Dimensions Model A B c D E F G H J K vEAl30n31 10.04 (255) 9.72 (2471 9.33 (237]. 9.61 (2441 8.90 (2261 5.35 (136) 5.08 (129) 2.36 (60) 1.57 (40) (145) Mounting Amplifier The VEA 130/131 Amplilier includes

TABLE OF CONTENTS

-17040-15 15-17040-16 15-17040-17 15-17039-14 15-17039-15 15-17039-16 15-17039-17 *15-17034-14 *15-17034-15 *15-17034-16 *15-17034-17 100 240 277 141 260 91.0 220 255 127 240 68.0 165 180 102 175 15-17040-18 15-17040-19 15-17040-20 15-17040-E17 15-17040-E21 15-17039-18 15-17039-19 15-17039-20 15-17039-E17 15-17039-E21 *15-17034-18 *15-17034-19 *15-17034-20 *15-17034-E17 *15-17034-E21 26 131

Table of Contents

Matching of the ejector to the vacuum circuit For precautions associated with matching of the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 131-19. Component Parts ZCU No. Description q w e Note Material Aluminum die-casted Zinc die-casted Zinc die-casted Body Valve cover Adapter plate AMJ Misc.

NVEPA|VEFseies

L l + + + + + radialon duo to imVrlical mounting aids heai Feedback circuit trEN-So-Fll mrRJi Electropneumatic proportional valve VGND t24vpc 1 12 vEA 130.131 DIMENSIONS vEA130/131 |:::=::=: Dimensions Model A B c D E F G H J K vEAl30n31 10.04 (255) 9.72 (2471 9.33 (237]. 9.61 (2441 8.90 (2261 5.35 (136) 5.08 (129) 2.36 (60) 1.57 (40) (145) Mounting Amplifier The VEA 130/131 Amplilier includes

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

NA x M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2 x M5 x 0.8 4H9 ( ) depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 ( ) depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131

SMC

adjuster at retraction end) 20 47 50 28 38 16 F 4H9 depth 3.5 +0.030 0 2-M5 x 0.8 thread depth 8 N 4-M4 x 0.7 thread depth 6 35 1 x F 2 4H9 depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131