SMC Corporation of America
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Vacuum Switch Diaphragm Style Series ZSM1-115/121 Specifications ZSE ISE PSE ZSM1-115 ZSM1-121 Model Solid state Contact (Reed switch) Switch specifications Z I SE3 Air/Inert gas Fluid 0.5 MPa Max. operating pressure PS 27 to 80 kPa Regulating pressure range Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Female thread MM MQ Thread depth A1 25 8 20 M5 x 0.8 121 RHC 32 12 20 M6 x 1 123 40 13 21 M8 x 1.25 159 RZQ * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used, use a washer etc. to prevent the contact part at the rod end from being deformed depending on the material of the workpiece. 3.5 ZZ +1.2 0 + Stroke H (mm) Bore size A AL B1

.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1 73 89 105 121 137 153 169 185 201 217 233 249 265 281 297 L2 118 134 150 166 182 198 214 230 246 262 278 294 310 326 342 L3 137.5 162.5 175 187.5 212.5 225 237.5 250 275 287.5 300 325 337.5 350 362.5 L4 148 173 185.5 198 223 235.5 248 260.5 285.5 298 310.5 335.5 348 360.5 373 n L 16 17 18 19

140 160 BY C EA K D BX J KA BP EB FA F GA GC GB B AL B1 H1 W/o rod boot to 500 to 600 to 600 to 750 to 750 to 1000 to 1000 to 1200 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 22 27 27 32 41 8 11 11 13 16 16 20 20 25 30 36 36 40 59 67 73 77 85 112.5 121

LS + Stroke ZZ + Stroke 30 8.5 54.5 4 16.5 54 71 40 11 70.5 5 22 66 86 45 13 82.5 5 22 82 106 55 14 101 5 28.5 Rod side flange style: CG1FQ 100 125 65 16 121 7 30 120 150 Other dimensions are the same as basic style.

.: CC-LINK System Max. 8 stations P. 2-4-150 Max.16 stations 0 1 2 With cable (0.6 m) With cable (1.5 m) With cable (3 m) P. 2-4-146 1 to 8 stations Kit L Max. 8 stations Kit T O Terminal block box 2 to 24 stations (2) Max. 16 stations 2-4-121 Base Mounted Series VQ1000 Manifold Option P. 2-4-208 VVQ1000-10A-1 Blanking plate assembly VVQ1000-16A SUP block plate VQ1000-FPGDouble check block

(mm) Bore (mm) Standard stroke (mm) Long stroke (mm) ZZ TB GB A H J K P TA B1 NA D AL H1 KA S C E I MM F GA Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 20 25 32 40 50 63 80 100 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 11 11 10 (11) 10 (12) 12 (13) 12 (13) 12 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4

Formula: L1 = 16n + 57, L2 = 16n + 110.5 n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 185 73 89 105 121 137 153 169 254.5 270.5 286.5 302.5 318.5 334.5 350.5 366.5 382.5 398.5 414.5 430.5 446.5 462.5 478.5 494.5 238.5 126.5 142.5 158.5 174.5 190.5 206.5 222.5

10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 20 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 92.5 (98.5) 10 64.5 (68.5) 92.5 (96.5) 12 70 (73.5) 108 (111.5) 16 69 (72.5) 95 (98.5) 121

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

4 1/4 1/4 1/4 1/2 1/2 3/4 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 112.5 121

Weight Valve model Weight [g] SY3A0R 90 Valve model Port size Weight [g] 2(B) port SY3A3R C4 91 C6 93 Valve model Weight [g] SY5A0R 94 Valve model Port size Weight [g] 2(B) port Symbol SY5A3R C4 118 C6 115 C8 121 2(B) Vacuum pad port Response Time SOL.b SOL.a Valve model Without light/surge voltage suppressor With light/surge voltage suppressor S/Z type R/U type SY3AlR 18 26 18 SY5AlR 27

100 146 73 121 53.5 22 13 4 x LD X X Y LZ LX Y Bore size (mm) Stroke range (mm) LT LH Y LZ X LX LY LS + Stroke 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 3.2 46 91.5 18.2 9 77 60 Rod end male thread 80 4.5 114 59 22.5 11 98 77 100 6 24 12.5 136 71 117 94 Compact foot bracket material: Carbon steel Surface treatment: Zinc chromated L1 Rod side flange style: CQ2YF/CDQ2YF Rod Side

116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

ZSM1-121 Connection example with PLC In the case of common terminal is negative LED Brown ( + ) Brown Resistance Reed switch Main circuit of switch Black ( ) ZSE ISE PLC Input terminal Zener diode ZSP () Blue Blue PS COM ISA PSE + IS ISG Dimensions ZSM 23 10 15 ZSM1-115 ZSM1-121 Pressure adjusting screw 52.5 500 Indicator light Indicator light R 1/8 871 Series ZSM1-115/121 Specific Product

47 M6x1 depth 12 50 285 1200 32 35 32 20 30 2 14 58 M8x1.25 depth 16 63 284 1200 32 35 38 20 32 2 14 72 M10x1.5 depth 16 80 284 1400 37 40 50 25 40 3 20 89 M10x1.5 depth 22 100 284 1500 37 40 60 30 50 3 20 110 M12x1.75 depth 22 Bore K KA MM NA P S TA **TC H ZZ (mm) 20 4 6 M8x1.25 24 18 77 11 M5x0.8 35 114 25 5 8 M10x1.25 29 18 77 11 M6x0.75 40 119 32 5.5 10 M10x1.25 36 18 79 11 M8x1.0 40 121

0.6 0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48 78 CXSJL6 88 129 114 99 144 198 CXSJM10 159 136 121