I

N G E 0 High pressure (0~1MPa) 1 Vacuum (-101~0kPa) 2 Low pressure (0~100kPa) * Based on 250C (80F) T E C H N I C A L SPECIFICATIONS PRESSURE SENSOR (NON-CORROSIVE GAS AND LIQUID) H O W T O O R D E R G A S A N D L I Q U I D S E N S O R Model No PSE520-01 PSE520-02 Operating Pressure Range 0~1MPa (0~145PSI) Max Operating Pressure 2MPa (30PSI) Fluid Fluid which does not corrode SUS304 and 630

Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

w e r t q w e r t i i o o !

PF2A/PF2W

When a surge generating a load such as a relay or solenoid is directly driven, use a type of switch with a built-in surge absorbing element. 4. Since the type of fluid varies depending on the product, be sure to verify the specifications. The switches do not have an explosion proof rating. To prevent a possible fire hazard, do not use with flammable gases or fluids. 5.

Model Selection 1

VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure to generate a flow rate of 500 l/min (ANR) is P1 0.14 MPa for a 6 orifice (VX2 4), and P1 0.3 MPa for a 4.5 orifice (VX23). 3 2 For Saturated

ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

MQQ

3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

V

48.5 63.6 25 89.5 79.5 10 15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

CM2

Use caution to the popping of a snap ring. When replacing rod seals and removing and mounting a snap ring, use a proper tool (snap ring plier: tool for installing a type C snap ring). Even if a proper tool is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier.

CM2

101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 20 25 32 40 109.5 134.5 Boss-cut style Built-in One-touch fitting With air cushion (mm) ZZ G 8 8 8 11 P 6 6 6 8 Q 23 26 28.5 32.5 Bore 20 25 32 40 Bore 20 25 32 40 N1 17.5 17.5 17.5 21.5 WA 13 13 13 16 WB 8.5 10.5

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

CQ2

Note q When removing a load, be sure to secure the wrench flats of the piston rod on the load side.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A Dimensions except A, L and L1 are the same as rod side flange style.

CL

is locked without a load.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.