JXCx-OMT0062

Example) 1 byte Binary Decimal Hexadecimal (BIN) (OCT) (HEX) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0

SYJ3000/5000/7000

) Manual override 0.3 + B A 0.2 Interface 0.1 0 50 100 150 200 0 Pilot valve (SY114) Adapter plate Flow rate l/min (ANR) ARBYJ7000-00-P Interface Regulator 0.6 Caution 0.5 Outlet pressure (MPa) Spacer type regulating valve on manifold block can regulate the pressure to the valve individually. 0.4 0.3 Specifications 0.2 Interface regulator ARBYJ7000 ARBYJ5000 0.1 Applicable solenoid valve

F

-00 3/16-18 17.46 34 15.08 16.5 3.5 6 KQE06-00 M14x1 17 34.5 15 17 13.1/13.1 1/4 KQE07-00 5/16-18 17.46 34.5 15.08 17 4.6 8 KQE08-00 M16x1 19 38 17 18.5 26.1/18 5/16 KQE09-00 3/4-16 22.23 38 19.8 18.5 6 10 KQE10-00 M20x1 24 42.5 21 21 41.5/29.5 3/8 KQE11-00 1/8-14 25.4 42.5 23 21 7 12 KQE12-00 M22x1 27 44.5 23 22 58.3/46.1 1/2 KQE13-00 1-12 28.6 44.5 26.2 22 9.6 16 KQE16-00 M26x1.5 30 49.5

IP80-OM00019

A CE 000 Q CE 100 IP8*00-0*0 Rc1/4 G1/2 IP8*00-0*1 M Rc1/4 M201.5 IP8*00-0* 0 N Rc1/4 1/2NPT IP8*00-0* 1 02MPa IP8*00-0*0 1 1/4NPT G1/2 IP8*00-0*1 2 03MPa 2 1/4NPT M201.5 IP8*00-0* 3 1.0MPa 3 1/4NPT 1/2NPT IP8*00-0* IP8*00-0*0 4 G14 G1/2 1 IP8*00-0*1 0 5 G14 M201.5 IP8*00-0* 6 G14 1/2NPT IP8*00-0* 1 (ExdBT5) 2 IP8000(1085mm) A 0.7mm IP8000IP8100 B 1.0mm 3 C M IP8100 D S E 35100mm

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

0 1 A-PET VCC12(D)-00 VCC13-00 (common) A-u B-w G-w H-w A-!0 O-ring assembly 1 set unit VCC12-OR-5 1 O-ring Special FKM Switching display cover Switching display cover 1 set unit VCC10-30A-1 10 A-PET Note) If the manifold is disassembled or rearranged, replace the O-rings with new O-rings.

Table of Contents

0 u !0 !2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

LEC-OM07605CN

BIN. _ _ _ x _ _ _ x FLS() 0 1 0h _ _ x _ RLS() 0 1 _ x _ _ x _ _ _ _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h 16 0 0 0 BIN HEX FLS() 0 0 RLS () 0 0 0 BIN 0: BIN 1: ON 5 39 5. [] PD07 *DO1 1 CN3-13 _ _ x x 5.8 05h _ x _ _ 0h x _ _ _ 0h 5.8 00 02 RD() 03 ALM() 04 INP() 05 MBR() 06 DB() 07 TLC() 08 WNG() 09 BWNG() 0A SA() 0C ZSP() 0F CDPS() 11 ABSV() 17 MTTR(Tough Drive) PD08 *DO2 2 CN3-9INP

KQ2

Applicable model Applicable thread Material Gasket M-10/32G 10-32 UNF Stainless steel 304, NBR KQ2E01-00, KQ2E03-00, KQ2E01-35 KQ2E03-35, KQ2LF01-00, KQ2LE03-00 KQ01-P01 KQ2E05-00, KQ2E07-00, KQ2E05-34 KQ2E07-35, KQ2LF05-00, KQ2LE07-00 KQ05-P01 Pipe nut KQ09-P01 KQ2E09-00, KQ2E09-36, KQ2LE09-00 KQ11-P01 KQ2E11-00, KQ2E11-36, KQ2LE11-00 KQ2E13-00, KQ2E13-36 KQ2E13-37, KQ2LE13-00 KQ13

One-touch Fittings

A 06 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D.

C95Series

HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!

JXCx-OMT0061CN

0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

KJ

(inch) Min. port size 2.5 3 4.6 Weight (g) Note) 2-Applicable tubing M Q L D Model KJL01-00 KJL03-00 KJL07-00 1 8 5.8 6.3 12.7 12.7 7.6 1.6 2 3.3 15 15.8 17.4 8.4 9.3 12 5 32 1 4 13.6 Note) D: Max. diameter Plug-in Elbow: KJL Applicable tubing O.D.

Ejector Valve Unit Series ZYY/ZYX 1

-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1 to 10% of set pressure (Adjustable) 1% full span

KJ

(inch) Weight (g) Note) D L M Model 2-Applicable tubing KQ2H01-00 KQ2H03-00 KQ2H05-00 KQ2H07-00 KQ2H09-00 KQ2H11-00 KQ2H13-00 1 8 5 32 3 16 1 4 9.6 10.4 11.4 13.2 15.2 17.9 21.7 31.5 32.5 34 34.5 38.5 42.5 44.5 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 3 3 4 4 6 11 16 5 16 3 8 1 2 Note) D: Max. diameter Different Diameter Straight: KQ2H Min. port size Applicable tubing O.D.

Ejector Valve Unit Series ZYY/ZYX

14 X129 (X130) ZSE1 00 15 X129 (X130) ZSE1 00 16 X129 (X130) ZSE1 00 17 X129 (X130) ZSE1 00 18 X129 (X130) ZSE1 00 19 X129 (X130) ZSE1 00 55 X129 (X130) Model Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1% full span or less Repeatability

Ejector Valve Unit, Series ZYY/ZYX

17 ZSE1 00 19 ZSE1 00 18 ZSE1 00 14 ZSE1 00 55 ZSE1 00 15 ZSE1 00 16 Model X129 (X130) X129 (X130) X129 (X130) X129 (X130) X129 (X130) X129 (X130) X129 (X130) Diffusion type semiconductor pressure sensor Sensor type 0 to 101kPa {0 to 760mmHg} Set pressure range 1 to 10% of set pressure (variable) Hysteresis 1 to 10% of set pressure (variable) 3% full span or less (fixed) 1% full span or

KR

(mm) Model 2-applicable tubing D Note) L FR soft nylon FR double layer KRH08-00 KRH06-00 6 12.8 34.5 17 15.2 38.5 18.5 18.5 42.5 21 20.9 44.5 22 5.6 18.0 29.5 46.1 10.4 4 6 11 14 KRH10-00 KRH12-00 8 10 12 26.1 41.5 58.3 Note) D: Max. diameter 15-3-2 3 Flame Resistant (Equivalent to UL-94 Standard V-0) FR One-touch Fittings Series KR Male Elbow: KRL Effective area (mm 2) FR soft nylon FR double

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Union Tee: KPQT, KPGT D 3 Applicable tubing Effective area mm D Model L Applicable tubing O.D. mm Note 1) Weight g M Q TPH TPS 4 L Q M D D KPQT04-00 KPGT04-00 20.7 4.5 18 4 4 7 10.4 6 KPQT06-00 KPGT06-00 22.8 5.3 19.5 10 10 9 12.8 8 KPQT08-00 KPGT08-00 26.3 6 21.5 26 18 16 15.2 4.2 8 10 KPQT10-00 KPGT10-00 29.4 6.8 24 41 29 25 18.5 M M L L 12 KPQT12-00 KPGT12-00 31.4 7.5 25 58 46 29 20.9

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

limit) selection 0 0 0 0 0 BIN 0: Use for an external input signal.