Modular Type Air Filters Series AF 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve option ** With
Pilot Solenoid Valve Specifications Internal pilot solenoid / External pilot solenoid Model VEX3121, VEX3221, VEX3321, VEX3421 VEX3122, VEX3222, VEX3322, VEX3422 Pilot valve V114, V115 Symbol Electrical entry Grommet (G), L plug connector (L), M plug connector (M), DIN terminal (D) Rated coil voltage [V] AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V DC 3 V, 5 V, 6 V, 12 V, 24 V Allowable voltage
N3 5/32" V V N7 1/4" V V V N9 5/16" *1 V V N11 3/8" V 4 V V Side ported Metric size B6 6 V V V B8 8 *1 V V B10 10 V B12 12 V BN3 5/32" V Side ported Inch size Downward elbow *1 Refer to mixed mounting type for 8, 5/16".
ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM
A power supply is not connected between +5 V to 12 V and 0 V of MR-HDP01. Connect a power supply between +5 V to 12 V and 0 V of MRHDP01. Power is not supplied to OPC (power input for open-collector Between DICOM and OPC of the CN1 connector of the driver is not connected. Connect between DICOM and OPC. sink interface).
(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Voltage output 1 to 5 V within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 100 k or more.
Vacuum (V) and exhaust (E) port should not be sealed simultaneously.
Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.
IC circuit 5 V, 12 V 12 V Reed auto switch Solid state auto switch IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indication) Grommet 24 V Yes 12 V Water resistant (2-color indication) IC circuit 5 V, 12 V M9PAV M9BAV 12 V 3-wire (NPN equivalent) A96V A96 IC circuit 5 V Yes 24 V Grommet A93V A90V A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V No 100 V or less
) 07 Servo motor-side droop pulses (Note 1, 3, 5, 6) (10 V/1000 pulses) CCW direction CCW direction 10 [V] 10 [V] 100 [pulse] 1000 [pulse] 0 0 100 [pulse] 1000 [pulse] -10 [V] -10 [V] CW direction CW direction 08 Servo motor-side droop pulses (Note 1, 3, 5, 6) (10 V/10 pulses) 09 Servo motor-side droop pulses (Note 1, 3, 5, 6) (10 V/10 pulses) CCW direction CCW direction 10 [V] 10 [V] 10
10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65 x L250 EHM15R10A EH15R10G EHM11R10A EH11R10G EHM10R10A EH10R10G EHM8R10A EH8R10G 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).
10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65 x L250 EHM15R10A EH15R10G EHM11R10A EH11R10G EHM10R10A EH10R10G EHM8R10A EH8R10G 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).
Integral Fitting Type Space Saving/Space Saving Connection Series LVQS How to Order LVQ 2 0 S 07 S Option (2) Applicable option Symbol Note 1 v v v v 24 v v v 2 v v v 3 v v v 4 v v v 5 v v v v 6 v v v v 7 v v v 8 v v v 9 v v v Body class Nil J K N Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Orifice dia.
circuit 4-wire (NPN) 5 V, 12 V Solid state switches marked with are produced upon receipt of order.
Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9
DOGZ .54 5.6.13 .56 5.6.14 .57 5.7 .58 5.8 .59 5 1 5 5 () 5.1 5.1.1 DO(7.7.4) (5.1.2) (5.1.3) MR Configurator (6) (7.7) (8) 5 2 5 5.1.2 (1) (a) (L1L2L3L11L21) (1.2) (b) (UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11kWP1-P) P1 P2 (C) 200V CNP2P-D PC (13.2) 5 3 5 (2) (a) DO CN6ON/OFF (b) CN6 DC24V (c) CN6 SD DOCOM CN6 DOCOM SD 5.1.3 (1) (a) (b) (12.4
I V I Width across ~ , flats 14 ZPT06U 6 7 2.5 3 5 1 .8 .ZPT08U 8 I 9 2.5 3 6 5 ""--/-cCl " M5XO.R Width across fiats 8 --. t w 0 ~ >-1 u / ~ Female Thread/ Weight list (gf) ~ ..
-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-8 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Example of Application Circuit Caution Handling of application circuits 1.
ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM
ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM