5

38 31 40 28.5 25.5 34 25.5 31.5 25.5 38.5 27.5 36.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 39 25.5 42 33 50 33.5 31 38.5 31 36 31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 43 36 40.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 52 45 49 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 59.5 53.5 57 53.5 62 55 59.5 55

Made to Order

23 (31) 30 22 (30) 35 27 (35) 29.5 21.5 (29.5) 27 19 (27) 32 32.5 23.5 (31.5) 31.5 22.5 (30.5) 36.5 27.5 (35.5) 31 22 (30) 28.5 19.5 (27.5) 40 37.5 25.5 (34.5) 36.5 24.5 (33.5) 41.5 29.5 (38.5) 36 24 (33) 33.5 21.5 (30.5) 50 44.5 30.5 (42.5) 43.5 29.5 (41.5) 49 34.5 (46.5) 43 29 (41) 40.5 26.5 (38.5) 63 43 32 (44) 42 31 (43) 47 36 (48) 41.5 30.5 (42.5) 39 28 (40) 80 56 37 (51) 55 36 (50)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 31 Effective area at exhaust side (mm 2) S at P2 = 0.5 MPa Flow Characteristics (P A) (Condition: Inlet pressure 0.7 MPa when 2 position solenoid valve is mounted.)

AS

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Mass (g) Mass (g) M1 d M1 L2 D2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 4.5 5.2 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 4.5 5.2 6.2 5.2 6.3 6.7 8.1 8.4 9.3

Air Cylinder Series CS1

30 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke Lube Non-lube Air-hydro 15 31 24 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke 17 36 26 M36 x 1.5 39 106 120 346 82 75 40 141 367 388 0.2 stroke 20 41 31 M40 x 1.5 39 111 135 381 92 85 45 153 399 417 0.2 stroke Lube Non-lube 20 46 31 M45 x 1.5 39 111 135 381 96 90 45 153 399 417 0.2 stroke 25 56 35 M56 x 2 49 141 160 461

7ND9071en

30 70mm 7 10 70mm 18 21 240mm 35 31 80mm 8 11 80mm 20 23 280mm 39 34 3 6 20mm VD_55 NDX VD_55 ND9206 Note: Mounted with ND9 / NDX smart positioners and B72G-2AS-980 AFR only.

KR

31 33.5 22 54 Reference dimensions after Uni thread installation.

LEC-OM02704CN

CR 8 9 10 11 ST1 12 ST2 13 14 15 16 17 / MD0 18 DOG DOG 19 20 21 22 23 24 / TSTP 1 DI0 25 2 DI1 26 3 DI2 27 CDP 4 DI3 28 5 DI4 29 6 DI5 30 7 DI6 31 8 DI7 14 26 14 (4) ON/OFF (a) [1][2][C][0] [1][2] [C][0] (b) b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 14 27 14 (5)

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Hs Hs Ht Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 72.5 73 30

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

M30 x 1.5 35 98 364 Lube Non-lube Air-hydro 1/2 341 133 40 75 110 318 0.2 stroke 15 31 24 M30 x 1.5 35 98 364 3/4 141 367 75 40 120 346 0.2 stroke 17 36 26 M36 x 1.5 39 106 388 3/4 399 153 45 85 381 135 0.2 stroke 20 31 41 M40 x 1.5 39 111 417 3/4 1 399 45 153 381 90 135 0.2 stroke 20 31 46 M45 x 1.5 39 111 417 Lube Non-lube 477 176 55 105 160 461 0.17 stroke 25 56 35 M56 x 2 49 141 493

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 Applicable air cylinder bore YA-08 80 62 10 25 11 26 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 76 12 30 14 31 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

F

Applicable Connection Thread Model H (Width D1 D2 L1 L2 A M Effective Tube OD mm Uni Thread Across Flats) Orifice (mm 2) Nylon 4 18 KQK04-U01 10 10.4 10 17 18.5 30 16 3.4 4 14 KQK04-U02 14 10.4 10 17 20.5 30.5 16 3.4 6 18 KQK06-U01 10 12.8 10 18 18.5 31 17 8.7 6 14 KQK06-U02 14 12.8 10 18 20.5 31 17 8.7 6 38 KQK06-U03 17 12.8 10 18 21.5 32 17 8.7 8 18 KQK08-U01 12 15.2 12 20.5 20 35 18.5

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-31. Steel !2 !

KJ

(inch) Connection thread UNF NPT Min. port size D Note) Weight (g) Model L1 L2 M KQ2F01-34 KQ2F01-35 KQ2F03-34 KQ2F03-35 KQ2F07-34 KQ2F07-35 KQ2F07-36 KQ2F09-34 KQ2F09-35 KQ2F09-36 KQ2F11-35 KQ2F11-36 KQ2F11-37 KQ2F13-36 KQ2F13-37 1 8 1 8 26.5 30.5 27 31 27.5 31 33.5 29 32.5 34.5 34.5 36.5 40.5 36.5 41 11.5 14.5 11 13.5 10.5 13.5 15.5 10.5 13.5 13 16 26 15 24 17 25 44 18 26 38 30 48 52 48

Step Motor Controller

While the test function operates at manual mode, only the output is valid. 31

5 Port Solenoid Valve

together beneath the manifold base part number. 1 to 2 stations AS-Interface 31 slave, 4 in/4 out, 2 isolated common type 1 to 4 stations AS-Interface 31 slave, 8 in/8 out, 1 common type 1 to 2 stations AS-Interface 31 slave, 4 in/4 out, 1 common type Serial transmission kit Note 1) The maximum number of stations is determined by the total number of solenoids.

Air Cylinder Series MB

25.5 34 25.5 31.5 28.5 25.5 38.5 27.5 36.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 42 33 31 38.5 31 36 33.5 31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 46.5 39 36 43 36 40.5 38.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 51.5 44 45 52 45 49 46.5 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 58 51.5 53.5 59.5 53.5 57 54 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 65.5 60.5 64.5 71

Air Slide Table Series MXQ

29 30 NN 2 2 3 3 4 4 G 7 14 8 8 31 N 4 4 6 6 6 6 HA 19 28 27 31 58 60 Model F 25 25 26 32 46 50 GA 13 14 29 39 37 61 KA 82.5 112.5 NA 4 4 4 4 8 8 MXQ8L-10 MXQ8L-20 MXQ8L-30 MXQ8L-40 MXQ8L-50 MXQ8L-75 Note) Note) Note) Refer to the bottom view of MXQ8L-30. 104 Air Slide Table Series MXQ With shock absorber (8): MXQ8L-BS/BT/B MXH Stroke Adjustable Range !!

Rotary Actuator/Vane Type

Size: 10 31 2 x M3 x 0.5 through 2 x 3.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 B port A port 29 9h9 0 0.036 17 4g70.004 0.016 0.5 2 x 3.5 through 9 14 31 29 1 3 10.6 7 16.5 9.5 2 x M3 x 0.5 1 18.5 35 19.8 67 2 15 When D-M9m is used *1.