Compact Manifold Regulator Series ARM5

1 q SMC o A Component Parts Description Replacement Parts Material Part no. Note Material No. Description No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

This is a legacy product, and replaced byVT317E-5D-02F-Q

This is a legacy product, and replaced byVK334-5D-Q, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, 2A, VK300 NO SIZE RATING, .24398 lb

AC Servo Motor Driver (Network card type ）

Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 A B C D E F -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Size: 7 [ø50(ø33)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: F (G(PF)), Port Size: 50A (2), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Size: 7 [ø50(ø33)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: NBR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: G(PF), Port Size: 2, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: CE Compliance

VNC

Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VVQ1000-50A-C3 Applicable tubing 3.2 VVQ1000-50A-C4 Applicable tubing 4 VVQ1000-50A-C6 Applicable tubing 6 Purchasing order is available in units of 10 pieces. Caution 1. Protect O-rings from scratches and dust to prevent air leakage. 2. The tightening torque for inserting fittings to the M5 thread assy should be 0.8 to 1.4 Nm.

70pvvna

Threaded type from 6A to 50A is standardized.