Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: B (FKM Seal), Body Material: Standard, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: B (FKM Seal), Body Material: Standard, Pilot System Option: Standard, Thread: N (NPT), Port Size: 8A (1/4), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/8, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/4, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference Range

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/4, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference Range

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: FKM Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/4, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliance: -

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: FPM Seal, Body Material: Standard, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 1/8, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

tube O.D.: 8 10 12 1 P 1 P B 2 B 2 B 2 B 2 B 2 VQZ The air outlet and external pilot locations for the built-in silencer type are on the B side (both sides) . + + When P/R ports are designated as B, P/R ports on both sides are open.

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

0.4

B B B B B B B X P X P 49 24.5 9.5 STA 1B 1A 1 2B 2A 2 4B 4A 4 3B 3A 3 D SIDE U SIDE 16 TERMINANAL NO.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

VFS

2 VFS6000-8A !

SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

SZ3000

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2nOne-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 + + + + + B COM A B COM A B COM A B COM A B COM A 300 Lead wire length DIN rail holding screw Manual override

LEC-OM02704CN

(ZP)[1][2][8][0]17bit 14 37 14 (5) ON/OFF((DO)) ON/OFF [9][0] (a) DO [8][B][0][0]0004DO 0 0 0 4 4 DO (b) ON/OFF [9][2] [A][0] b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 (c) DO DO[8][B][0][0] [8][B] [0][0] 0 DO 14 38 14 (6) (a) [8][B][0][0]0003 0 0 0 3 3 (b) ([8][B]

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Base Mounted Metal Seal/Rubber Seal Series VQ

Unused A Unused A A A B A B A B A B A B A B A VQC Double Double Double Double Single Single Single Single Single Single SI unit SI unit SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 Single/Double mixed wiring (Option) Double wiring (Standard) VQ4 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ5 VQZ ADDRESS NO. STATION NO.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.