A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

AC Servo Motor Driver (Pulse input type/Positioning type ）

USING STO FUNCTION 131 to 13-13 13.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

2/3 Port Valve

VX021 001 01 CBTZ Applicable voltage for electrical option Power supply Voltage code Surge suppressor Light Rated voltage Coil combination code 01 02 03 04 07 08 05 06 02 200V AC 50/60Hz 01 100V AC 50/60Hz 08 48V AC 50/60Hz (See the table below.) 13 24V AC 50/60Hz AC 03 110V AC 50/60Hz 23 440V AC 50/60Hz 04 220V AC 50/60Hz 51 6V DC Solenoid No. 05 24V DC 53 48V DC Applicable valve model

JXCx-OMY0008

Alarm_Co mment_1 11 (01-111) 6F C RESET Input The motor speed exceeds a specific level due to an external force, etc. Speed exceeded set value (01-144) Make improvements so that the motor speed will not exceed the maximum speed of the actuator.

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 (A port) 18 8.5 2 x 4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D, Y): 10-SYJ54MD Y-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx

Basic type / Direct mount type Series CY3B/CY3R

-01-04-X214 AS1201FPQ-M5-04-X214 Elbow type/Brass (throttle valve) AS2201FPQ-01-06-X214 AS1201FPQ-M5-06-X214 CY1S With clean One-touch fitting AS2201FPQ-01-08-X214 AS2201FPG-01-04-X214 AS1201FPG-M5-04-X214 Elbow type/ Stainless steel 304 (throttle valve) CY1L AS2201FPG-01-06-X214 AS1201FPG-M5-06-X214 AS2201FPG-01-08-X214 CY1H Note 1) Refer to Back Page 10 (How to Use Clean Series) for the

VS 8-2/VS 8-4

8 Manifold Block Assembly Standard 18 mm and 26 mm sizes mixed MBS8020 01 D M MBS80 0 01 D 2 With/Without tie-rod Size 2 4 Size 18 mm Size 26 mm With/Without tie-rod Cylinder port size 01 01B Side ported 1/8 Bottom ported 1/8 Nil Nil -1 Included None 1 Included None Thread type Wiring specifications D S Double wiring Single wiring Rc NPTF G Note) Nil T F Note) Conforms to ISO1179-1 Thread

JXCx-OMX0009

The station No. of CC-Link is shown. (01 to 64) Set the CC-Link communication speed. STATION NO. Switch name Set range Description STATION NO. (X10) Set upper bits of the station. 01 to 64 STATION NO. (X1) Set lower bits of the station. The CC-Link address setting at the time of the factory shipment is set in 01".

Magnetically Coupled Rodless Cylinder

-ASD330F-01-08 10-ASD230F-M5-06 2.

HRX-OM-M091

Table 2.4-13 Set values Set values Explanation Default setting Setting/checking are not available unless the function setting of contact output 1 is selected alarm status signal. Sets selection alarm. Set range is AL.01 to AL.36. to Contact output 2 function Setting and checking 25. Press the [SEL] key once.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Side ported 1/8 Side ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 3-11-12 13 Series EVS1-01/1-02 Conforming to ISO Standard Solenoid Valve (with M Connector) Model Series EVS1-01 Flow characteristics 1 4, 2 (P A, B)

0.4

D Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 F With bracket Name plate N Note) When two or more symbols are specified, indicate them alphabetically.

JXCx-OMY0004

JXC-OMY0004-A 12.2 Pushing Operation 52 13.

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)